Paper Abstract and Keywords |
Presentation |
2019-11-21 10:10
Investigation of flat thin film growth conditions in ALD growth of ZnO Ryo Yamamoto, Hiroto Kano, Atsushi Nakamura, Wataru Inami (Shizuoka Univ.) ED2019-33 CPM2019-52 LQE2019-76 Link to ES Tech. Rep. Archives: ED2019-33 CPM2019-52 LQE2019-76 |
Abstract |
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(in English) |
(Not available yet) |
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Reference Info. |
IEICE Tech. Rep., vol. 119, no. 303, CPM2019-52, pp. 1-4, Nov. 2019. |
Paper # |
CPM2019-52 |
Date of Issue |
2019-11-14 (ED, CPM, LQE) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
ED2019-33 CPM2019-52 LQE2019-76 Link to ES Tech. Rep. Archives: ED2019-33 CPM2019-52 LQE2019-76 |
Conference Information |
Committee |
CPM LQE ED |
Conference Date |
2019-11-21 - 2019-11-22 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Shizuoka Univ. (Hamamatsu) |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Nitride Semiconductor Devices, Materials, Related Technologies |
Paper Information |
Registration To |
CPM |
Conference Code |
2019-11-CPM-LQE-ED |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
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Title (in English) |
Investigation of flat thin film growth conditions in ALD growth of ZnO |
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1st Author's Name |
Ryo Yamamoto |
1st Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
2nd Author's Name |
Hiroto Kano |
2nd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
3rd Author's Name |
Atsushi Nakamura |
3rd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
4th Author's Name |
Wataru Inami |
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Shizuoka University (Shizuoka Univ.) |
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Speaker |
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Date Time |
2019-11-21 10:10:00 |
Presentation Time |
20 minutes |
Registration for |
CPM |
Paper # |
ED2019-33, CPM2019-52, LQE2019-76 |
Volume (vol) |
vol.119 |
Number (no) |
no.302(ED), no.303(CPM), no.304(LQE) |
Page |
pp.1-4 |
#Pages |
4 |
Date of Issue |
2019-11-14 (ED, CPM, LQE) |
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