Paper Abstract and Keywords |
Presentation |
2020-10-29 15:10
Hydrogen effects on the properties of BCN films deposited by magnetron sputtering Ryu Taniguchi, Haruto Koriyama, Yasuyuki Kobayashi, Yoshiharu Enta (Hirosaki Univ.), Hirokazu Fukidome (Tohoku Univ.), Hideki Nakazawa (Hirosaki Univ.) CPM2020-17 Link to ES Tech. Rep. Archives: CPM2020-17 |
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Reference Info. |
IEICE Tech. Rep., vol. 120, no. 217, CPM2020-17, pp. 23-26, Oct. 2020. |
Paper # |
CPM2020-17 |
Date of Issue |
2020-10-22 (CPM) |
ISSN |
Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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CPM2020-17 Link to ES Tech. Rep. Archives: CPM2020-17 |
Conference Information |
Committee |
CPM |
Conference Date |
2020-10-29 - 2020-10-29 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Online |
Topics (in Japanese) |
(See Japanese page) |
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Registration To |
CPM |
Conference Code |
2020-10-CPM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
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Title (in English) |
Hydrogen effects on the properties of BCN films deposited by magnetron sputtering |
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1st Author's Name |
Ryu Taniguchi |
1st Author's Affiliation |
Hirosaki University (Hirosaki Univ.) |
2nd Author's Name |
Haruto Koriyama |
2nd Author's Affiliation |
Hirosaki University (Hirosaki Univ.) |
3rd Author's Name |
Yasuyuki Kobayashi |
3rd Author's Affiliation |
Hirosaki University (Hirosaki Univ.) |
4th Author's Name |
Yoshiharu Enta |
4th Author's Affiliation |
Hirosaki University (Hirosaki Univ.) |
5th Author's Name |
Hirokazu Fukidome |
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Tohoku University (Tohoku Univ.) |
6th Author's Name |
Hideki Nakazawa |
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Hirosaki University (Hirosaki Univ.) |
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Speaker |
Author-1 |
Date Time |
2020-10-29 15:10:00 |
Presentation Time |
20 minutes |
Registration for |
CPM |
Paper # |
CPM2020-17 |
Volume (vol) |
vol.120 |
Number (no) |
no.217 |
Page |
pp.23-26 |
#Pages |
4 |
Date of Issue |
2020-10-22 (CPM) |
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