Paper Abstract and Keywords |
Presentation |
2023-02-28 09:05
Fabrication and Evaluation of Zinc Oxynitride Thin Films Using Atomic Layer Deposition Taichi Tasaki, Kentarou Saito, Kensaku Kanomata, Masanori Miura, Bashir Ahmmad, Humihiko Hirose (Yamagata Univ.) CPM2022-85 |
Abstract |
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Reference Info. |
IEICE Tech. Rep., vol. 122, no. 392, CPM2022-85, pp. 1-4, Feb. 2023. |
Paper # |
CPM2022-85 |
Date of Issue |
2023-02-21 (CPM) |
ISSN |
Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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CPM2022-85 |
Conference Information |
Committee |
CPM |
Conference Date |
2023-02-28 - 2023-02-28 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Tokyo University of Technology |
Topics (in Japanese) |
(See Japanese page) |
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Paper Information |
Registration To |
CPM |
Conference Code |
2023-02-CPM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Fabrication and Evaluation of Zinc Oxynitride Thin Films Using Atomic Layer Deposition |
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1st Author's Name |
Taichi Tasaki |
1st Author's Affiliation |
Yamagata University (Yamagata Univ.) |
2nd Author's Name |
Kentarou Saito |
2nd Author's Affiliation |
Yamagata University (Yamagata Univ.) |
3rd Author's Name |
Kensaku Kanomata |
3rd Author's Affiliation |
Yamagata University (Yamagata Univ.) |
4th Author's Name |
Masanori Miura |
4th Author's Affiliation |
Yamagata University (Yamagata Univ.) |
5th Author's Name |
Bashir Ahmmad |
5th Author's Affiliation |
Yamagata University (Yamagata Univ.) |
6th Author's Name |
Humihiko Hirose |
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Yamagata University (Yamagata Univ.) |
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Speaker |
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Date Time |
2023-02-28 09:05:00 |
Presentation Time |
15 minutes |
Registration for |
CPM |
Paper # |
CPM2022-85 |
Volume (vol) |
vol.122 |
Number (no) |
no.392 |
Page |
pp.1-4 |
#Pages |
4 |
Date of Issue |
2023-02-21 (CPM) |