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Paper Abstract and Keywords
Presentation 2023-07-07 12:00
Polygon Fracturing Method Considering Maximum Size Limit
Taiki Matsuzaki, Kunihiro Fujiyoshi (TUAT) CAS2023-22 VLD2023-22 SIP2023-38 MSS2023-22
Abstract (in Japanese) (See Japanese page) 
(in English) The exposure data, which serves as input for variable shaped-beam mask writing, must be a set of rectangles, and it is crucial to partition the layout into as few rectangles as possible, with keeping maximum size limit. We find three types of optimal single-partitions, that ensure partitioning without increasing the number of rectangles obtained, and proved theorems. Computational experiments to evaluate the performance of combining these optimal single-partitions with greedy partitioning to Kahng's ILP method was done.
Keyword (in Japanese) (See Japanese page) 
(in English) Rectilinear Polygon / Fracture / Optimal Single-Partition / Variable Shaped-Beam Mask Writing / / / /  
Reference Info. IEICE Tech. Rep., vol. 123, no. 97, CAS2023-22, pp. 107-112, July 2023.
Paper # CAS2023-22 
Date of Issue 2023-06-29 (CAS, VLD, SIP, MSS) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF CAS2023-22 VLD2023-22 SIP2023-38 MSS2023-22

Conference Information
Committee MSS CAS SIP VLD  
Conference Date 2023-07-06 - 2023-07-07 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To CAS 
Conference Code 2023-07-MSS-CAS-SIP-VLD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Polygon Fracturing Method Considering Maximum Size Limit 
Sub Title (in English)  
Keyword(1) Rectilinear Polygon  
Keyword(2) Fracture  
Keyword(3) Optimal Single-Partition  
Keyword(4) Variable Shaped-Beam Mask Writing  
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1st Author's Name Taiki Matsuzaki  
1st Author's Affiliation Tokyo University of Agriculture and Technology (TUAT)
2nd Author's Name Kunihiro Fujiyoshi  
2nd Author's Affiliation Tokyo University of Agriculture and Technology (TUAT)
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Speaker Author-1 
Date Time 2023-07-07 12:00:00 
Presentation Time 20 minutes 
Registration for CAS 
Paper # CAS2023-22, VLD2023-22, SIP2023-38, MSS2023-22 
Volume (vol) vol.123 
Number (no) no.97(CAS), no.98(VLD), no.99(SIP), no.100(MSS) 
Page pp.107-112 
#Pages 6 
Date of Issue 2023-06-29 (CAS, VLD, SIP, MSS) 

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