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Paper Abstract and Keywords
Presentation 2023-07-31 14:40
Evaluation of VUV Absorption Characteristics in Surface Modification of Dielectric Resin Materials by VUV Light
Shinichi Endo, Yuki Ishikawa (Osaka Prefecture University), Hina Shirakashi, Takeyasu Saito (Osaka Metropolitan univ.) CPM2023-13
Abstract (in Japanese) (See Japanese page) 
(in English) Since resin generally absorbs vacuum ultraviolet (VUV) light well, it is thought that the VUV light reaching the inside of the resin are limited to the very surface. However, there are almost no reports on the absorption and transmission characteristics of VUV light in actual resin materials. In this study, we measured the spectral transmittance of the epoxy resin in the 140-220 nm region using a vacuum ultraviolet spectrometer, which is used as an insulating material for actual electronic devices, as a work. Epoxy resin was irradiated with some VUV doses and the surface condition was analyzed by XPS and FTIR-ATR. Based on the absorption coefficient, we evaluated the penetration of the VUV light (center wavelength 172 nm) emitted by the excimer lamp in the depth direction of the resin.
Keyword (in Japanese) (See Japanese page) 
(in English) Epoxy resin / excimer lamp / VUV spectrometer / absorption coefficient / / / /  
Reference Info. IEICE Tech. Rep., vol. 123, no. 142, CPM2023-13, pp. 7-10, July 2023.
Paper # CPM2023-13 
Date of Issue 2023-07-24 (CPM) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF CPM2023-13

Conference Information
Committee CPM  
Conference Date 2023-07-31 - 2023-08-01 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To CPM 
Conference Code 2023-07-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Evaluation of VUV Absorption Characteristics in Surface Modification of Dielectric Resin Materials by VUV Light 
Sub Title (in English)  
Keyword(1) Epoxy resin  
Keyword(2) excimer lamp  
Keyword(3) VUV spectrometer  
Keyword(4) absorption coefficient  
Keyword(5)  
Keyword(6)  
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1st Author's Name Shinichi Endo  
1st Author's Affiliation Osaka Prefecture University (Osaka Prefecture University)
2nd Author's Name Yuki Ishikawa  
2nd Author's Affiliation Osaka Prefecture University (Osaka Prefecture University)
3rd Author's Name Hina Shirakashi  
3rd Author's Affiliation Osaka Metropolitan University (Osaka Metropolitan univ.)
4th Author's Name Takeyasu Saito  
4th Author's Affiliation Osaka Metropolitan University (Osaka Metropolitan univ.)
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Speaker Author-1 
Date Time 2023-07-31 14:40:00 
Presentation Time 30 minutes 
Registration for CPM 
Paper # CPM2023-13 
Volume (vol) vol.123 
Number (no) no.142 
Page pp.7-10 
#Pages 4 
Date of Issue 2023-07-24 (CPM) 

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