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Paper Abstract and Keywords
Presentation 2023-10-27 10:30
Mechanical properties and heat resistance of Si- and N-doped diamond-like carbon films
Yuya Yamazaki, Yuya Sasaki, Hideki Nakazawa (Hirosaki Univ.) MRIS2023-17 CPM2023-51 OME2023-38
Abstract (in Japanese) (See Japanese page) 
(in English) Silicon- and nitrogen-doped diamond-like carbon (Si–N–DLC) films have been deposited by plasma-enhanced chemical vapor deposition using H2 and Ar as the dilution gases. We investigated the effects of hydrogen flow ratio [H2/(H2+Ar)] on the mechanical properties and heat resistance of the films. As the H2 flow ratio increased, the critical load (adhesion) increased, resulting from a decrease in internal stress. When the hydrogen flow ratio varied, the friction coefficient and specific wear rate remained almost unchanged. Although the friction coefficient and specific wear rate changed little after heat treatment at 550°C regardless of hydrogen flow ratio, those of the films heat-treated at 600°C tended to increase at higher hydrogen flow ratios. This is probably due to changes in the film structure caused by hydrogen desorption.
Keyword (in Japanese) (See Japanese page) 
(in English) Diamond-like carbon / Plasma-enhanced chemical vapor deposition / Mechanical properties / Heat resistance / / / /  
Reference Info. IEICE Tech. Rep., vol. 123, no. 230, CPM2023-51, pp. 33-36, Oct. 2023.
Paper # CPM2023-51 
Date of Issue 2023-10-19 (MRIS, CPM, OME) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF MRIS2023-17 CPM2023-51 OME2023-38

Conference Information
Committee MRIS CPM ITE-MMS OME  
Conference Date 2023-10-26 - 2023-10-27 
Place (in Japanese) (See Japanese page) 
Place (in English) Niigata Univ. Ekiminami Campus 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Spintronics, Solid State Memory, Functional material, Thin film process, Material, Devices, etc. 
Paper Information
Registration To CPM 
Conference Code 2023-10-MRIS-CPM-MMS-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Mechanical properties and heat resistance of Si- and N-doped diamond-like carbon films 
Sub Title (in English)  
Keyword(1) Diamond-like carbon  
Keyword(2) Plasma-enhanced chemical vapor deposition  
Keyword(3) Mechanical properties  
Keyword(4) Heat resistance  
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1st Author's Name Yuya Yamazaki  
1st Author's Affiliation Hirosaki University (Hirosaki Univ.)
2nd Author's Name Yuya Sasaki  
2nd Author's Affiliation Hirosaki University (Hirosaki Univ.)
3rd Author's Name Hideki Nakazawa  
3rd Author's Affiliation Hirosaki University (Hirosaki Univ.)
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Speaker Author-1 
Date Time 2023-10-27 10:30:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # MRIS2023-17, CPM2023-51, OME2023-38 
Volume (vol) vol.123 
Number (no) no.229(MRIS), no.230(CPM), no.231(OME) 
Page pp.33-36 
#Pages 4 
Date of Issue 2023-10-19 (MRIS, CPM, OME) 

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