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Paper Abstract and Keywords
Presentation 2023-12-22 13:00
[Poster Presentation] Double mode type BAW filter based on ScAlN multilayers SMR using stacked electrodes
Saneyuki Shibata, Takahiko Yanagitani (Waseda Univ.) US2023-56
Abstract (in Japanese) (See Japanese page) 
(in English) Surface acoustic wave (SAW) filters, which use surface acoustic waves, and bulk acoustic wave (BAW) filters, which use bulk acoustic waves, are used as RF filters in smartphones. SAW filters are mainly classified into two types: ladder-type SAW filters, in which SAW resonators are connected in a ladder-like structure [2], and double mode type SAW (DMS) filters, which use acoustic coupling between SAW resonators [3]. On the other hand, ladder-type BAW filters, in which BAW resonators are connected in a ladder-like structure, are the most commonly used BAW filters, and BAW filters using acoustic coupling like DMS filters in SAW filters are rarely used in practical applications. Although many studies have been reported on SCF (Stacked Crystal Filter) [4] and CRF (Coupled Resonator Filter) [5] structures, they are not as widely used as DMS filters due to difficulties adjusting the bandwidth. In this study, we propose a new BAW filter that uses acoustic coupling between BAW resonators, a double mode type BAW (DMB) filter that employs a polarization-inverted multilayer structure and a piezoelectric thin-film multilayer structure with intermediate electrodes.
Keyword (in Japanese) (See Japanese page) 
(in English) DMS filter / BAW filter / Bandpass filter / ScAlN / Polarization-inverted multilayer / 5G / /  
Reference Info. IEICE Tech. Rep., vol. 123, no. 321, US2023-56, pp. 1-6, Dec. 2023.
Paper # US2023-56 
Date of Issue 2023-12-15 (US) 
ISSN Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF US2023-56

Conference Information
Committee EA US  
Conference Date 2023-12-22 - 2023-12-23 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English) [Joint Meeting on Acoustics and Ultrasonics Subsociety] Engineering/Electro Acoustics, Ultrasonics, etc. 
Paper Information
Registration To US 
Conference Code 2023-12-EA-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Double mode type BAW filter based on ScAlN multilayers SMR using stacked electrodes 
Sub Title (in English)  
Keyword(1) DMS filter  
Keyword(2) BAW filter  
Keyword(3) Bandpass filter  
Keyword(4) ScAlN  
Keyword(5) Polarization-inverted multilayer  
Keyword(6) 5G  
1st Author's Name Saneyuki Shibata  
1st Author's Affiliation Waseda University (Waseda Univ.)
2nd Author's Name Takahiko Yanagitani  
2nd Author's Affiliation Waseda University (Waseda Univ.)
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Speaker Author-1 
Date Time 2023-12-22 13:00:00 
Presentation Time 120 minutes 
Registration for US 
Paper # US2023-56 
Volume (vol) vol.123 
Number (no) no.321 
Page pp.1-6 
Date of Issue 2023-12-15 (US) 

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