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Paper Abstract and Keywords
Presentation 2024-11-01 11:50
Mechanical and Tribological Properties of Si, N and O-Doped DLC Films by Plasma Enhanced Chemical Vapor Deposition
Yuya Yamazaki, Ryoya Katayama, Yoshiharu Enta, Yushi Suzuki, Yasuyuki Kobayashi, Hideki Nakazawa (Hirosaki Univ.) MRIS2024-25 CPM2024-54
Abstract (in Japanese) (See Japanese page) 
(in English) Diamond-like carbon films doped with Si, N, and O (Si-N-O-DLC) have been prepared by radio frequency plasma-enhanced chemical vapor deposition, and the effects of CO2 flow ratio [CO2/(CO2+CH4)] on the film properties were investigated. As the CO2 flow ratio increased, the internal stress decreased, and the critical load (adhesion strength) of the films increased. The friction coefficient decreased with the CO2 flow ratio, and the specific wear rate tended to decrease at lower CO2 flow ratios. Furthermore, the friction coefficient remained low even after annealing at 550ºC in air. The optical bandgap increased at higher CO2 flow ratios, and the contact angle of ultra-pure water decreased with an increase in CO2 flow ratio, indicating the surface of the films was hydrophilized.
Keyword (in Japanese) (See Japanese page) 
(in English) Diamond-like carbon / Mechanical properties / Tribological properties / Heat resistance / Optical properties / / /  
Reference Info. IEICE Tech. Rep., vol. 124, no. 228, CPM2024-54, pp. 73-76, Oct. 2024.
Paper # CPM2024-54 
Date of Issue 2024-10-24 (MRIS, CPM) 
ISSN Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF MRIS2024-25 CPM2024-54

Conference Information
Committee MRIS CPM ITE-MMS  
Conference Date 2024-10-31 - 2024-11-01 
Place (in Japanese) (See Japanese page) 
Place (in English) Nagano Camp. Shinshu Univ. + Online 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Spintronics, Solid State Memory, Functional material, Thin film process, Material, Devices, etc. 
Paper Information
Registration To CPM 
Conference Code 2024-10-MRIS-CPM-MMS 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Mechanical and Tribological Properties of Si, N and O-Doped DLC Films by Plasma Enhanced Chemical Vapor Deposition 
Sub Title (in English)  
Keyword(1) Diamond-like carbon  
Keyword(2) Mechanical properties  
Keyword(3) Tribological properties  
Keyword(4) Heat resistance  
Keyword(5) Optical properties  
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1st Author's Name Yuya Yamazaki  
1st Author's Affiliation Hirosaki University (Hirosaki Univ.)
2nd Author's Name Ryoya Katayama  
2nd Author's Affiliation Hirosaki University (Hirosaki Univ.)
3rd Author's Name Yoshiharu Enta  
3rd Author's Affiliation Hirosaki University (Hirosaki Univ.)
4th Author's Name Yushi Suzuki  
4th Author's Affiliation Hirosaki University (Hirosaki Univ.)
5th Author's Name Yasuyuki Kobayashi  
5th Author's Affiliation Hirosaki University (Hirosaki Univ.)
6th Author's Name Hideki Nakazawa  
6th Author's Affiliation Hirosaki University (Hirosaki Univ.)
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Speaker Author-1 
Date Time 2024-11-01 11:50:00 
Presentation Time 20 minutes 
Registration for CPM 
Paper # MRIS2024-25, CPM2024-54 
Volume (vol) vol.124 
Number (no) no.227(MRIS), no.228(CPM) 
Page pp.73-76 
#Pages 4 
Date of Issue 2024-10-24 (MRIS, CPM) 

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