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Technical Committee on Silicon Device and Materials (SDM) (Searched in: 2021)
Search Results: Keywords 'from:2022-02-04 to:2022-02-04'
| Committee | Date Time | Place | Paper Title / Authors | Abstract | Paper # | |
| SDM | 2022-02-04 09:05 |
Online | Online | [Invited Talk]
Quantitative evaluation on barrier property of ultra-thin PVD-Co(W) films using lag-time method Takeshi Momose, Taewoong Kim, Yubin Deng, Momoko Deura (UTokyo), Akira Matsuo, Nobuo Yamaguchi (CANON ANELVA), Yukihiro Shimogaki (UTokyo)  SDM2021-74 |
For the development of ultra-thin barrier layers for Cu interconnections in ultra large scale integration, it is essenti... [more] | SDM2021-74 pp.1-4 |
| SDM | 2022-02-04 09:45 |
Online | Online | [Invited Talk]
Advanced Damascene Integration with Self Assembled Monolayer (SAM) Hiroyuki Nagai, Mitsuaki Iwashita, Yuki Kikuchi (TEL), Kawasaki Hiroaki, Gyana Pattanaik (TTCA), Keiichi Fujita (TKL), Kazutoshi Iwai (TEA), Hiroyuki Komatsu, Yuuki Ozaki (JSR) SDM2021-75 |
Selective deposition of Cu diffusion barrier metal layer on dielectric with Self-Assembled Monolayer (SAM) has been demo... [more] | SDM2021-75 pp.5-8 |
| SDM | 2022-02-04 10:40 |
Online | Online | [Invited Talk]
Printed Electronics using low-temperature catalyzed solution-processed SiO2 Takeo Minari (NIMS), Qingqing Sun (Zhengzhou Univ.), Lingying Li (NIMS), Wanli Li (Jiangnan Univ.), Xuying Liu (Zhengzhou Univ.) SDM2021-76 |
Fabrication of electronics devices by Printed Electronics has attracted considerable interest because of the low-process... [more] | SDM2021-76 pp.9-12 |
| SDM | 2022-02-04 11:20 |
Online | Online | [Invited Talk]
3D Sequential Process Integration for CMOS Image Sensor Keiichi Nakazawa, Junpei Yamamoto, Nobutoshi Fujii, Mutsuo Uehara, Katsunori Hiramatsu, Hideomi Kumano, Shigetaka Mori, Shintaro Okamoto, Akito Shimizu, Koichi Baba, Hidetoshi Onuma, Akira Matsumoto, Koichiro Zaitsu, Keiji Tanani, Tomoyuki Hirano, Hayato Iwamoto (Sony Semiconductor Solutions) SDM2021-77 |
We developed a new structure of pixel transistors stacked over photodiode named “2-Layer Transistor Pixel Stacked CMOS I... [more] | SDM2021-77 pp.13-16 |
| SDM | 2022-02-04 13:00 |
Online | Online | [Invited Talk]
Superconducting Quantum Computers
-- Scalable wiring architecture -- Yutaka Tabuchi (RIKEN) SDM2021-78 |
Research and development of quantum computers using solid-state qubits are accelerating. Whereas people anticipate solid... [more] | SDM2021-78 pp.17-20 |
| SDM | 2022-02-04 13:40 |
Online | Online | [Invited Talk]
3D Integration Technology for Quantum Computer based on Diamond Spin Qubits Ryoichi Ishihara, Jeffrel Hermias, Shuichang Yu, King Y. Yu, Ye Li, Maurice van der Maas, Salahuddin Nur (TUDelft), Toshiki Iwai, Tetsuya Miyatake, Kenichi Kawaguchi, Yoshiyasu Doi, Shintaro Sato (Fujitsu) SDM2021-79 |
Quantum computer chip based on spin qubits in diamond uses modules that are entangled with on-chip optical links. This e... [more] | SDM2021-79 pp.21-26 |
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