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| Chair |
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Hiroshige Hirano (TowerPartners Semiconductor) |
| Vice Chair |
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Shunichiro Ohmi (Tokyo Inst. of Tech.) |
| Secretary |
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Takahiro Mori (AIST), Nobuaki Kobayashi (Nihon Univ.) |
| Assistant |
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Taiji Noda (Panasonic), Tomoyuki Suwa (Tohoku Univ.) |
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| Conference Date |
Fri, Feb 4, 2022 09:00 - 14:25 |
| Topics |
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| Conference Place |
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| Sponsors |
This conference is co-sponsored by The Japan Society of Applied Physics.
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Copyright
and
reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
| Registration Fee |
This workshop will be held as the IEICE workshop in fully electronic publishing. Registration fee will be necessary except the speakers and participants other than the participants to workshop(s) in non-electronic publishing. See the registration fee page. We request the registration fee or presentation fee to participants who will attend the workshop(s) on SDM. |
Fri, Feb 4 AM
09:00 - 14:25 |
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09:00-09:05 |
Opening ( 5 min. ) |
| (1) |
09:05-09:45 |
[Invited Talk]
Quantitative evaluation on barrier property of ultra-thin PVD-Co(W) films using lag-time method  SDM2021-74 |
Takeshi Momose, Taewoong Kim, Yubin Deng, Momoko Deura (UTokyo), Akira Matsuo, Nobuo Yamaguchi (CANON ANELVA), Yukihiro Shimogaki (UTokyo) |
| (2) |
09:45-10:25 |
[Invited Talk]
Advanced Damascene Integration with Self Assembled Monolayer (SAM) SDM2021-75 |
Hiroyuki Nagai, Mitsuaki Iwashita, Yuki Kikuchi (TEL), Kawasaki Hiroaki, Gyana Pattanaik (TTCA), Keiichi Fujita (TKL), Kazutoshi Iwai (TEA), Hiroyuki Komatsu, Yuuki Ozaki (JSR) |
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10:25-10:40 |
Break ( 15 min. ) |
| (3) |
10:40-11:20 |
[Invited Talk]
Printed Electronics using low-temperature catalyzed solution-processed SiO2 SDM2021-76 |
Takeo Minari (NIMS), Qingqing Sun (Zhengzhou Univ.), Lingying Li (NIMS), Wanli Li (Jiangnan Univ.), Xuying Liu (Zhengzhou Univ.) |
| (4) |
11:20-12:00 |
[Invited Talk]
3D Sequential Process Integration for CMOS Image Sensor SDM2021-77 |
Keiichi Nakazawa, Junpei Yamamoto, Nobutoshi Fujii, Mutsuo Uehara, Katsunori Hiramatsu, Hideomi Kumano, Shigetaka Mori, Shintaro Okamoto, Akito Shimizu, Koichi Baba, Hidetoshi Onuma, Akira Matsumoto, Koichiro Zaitsu, Keiji Tanani, Tomoyuki Hirano, Hayato Iwamoto (Sony Semiconductor Solutions) |
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12:00-13:00 |
Lunch Break ( 60 min. ) |
| (5) |
13:00-13:40 |
[Invited Talk]
Superconducting Quantum Computers
-- Scalable wiring architecture -- SDM2021-78 |
Yutaka Tabuchi (RIKEN) |
| (6) |
13:40-14:20 |
[Invited Talk]
3D Integration Technology for Quantum Computer based on Diamond Spin Qubits SDM2021-79 |
Ryoichi Ishihara, Jeffrel Hermias, Shuichang Yu, King Y. Yu, Ye Li, Maurice van der Maas, Salahuddin Nur (TUDelft), Toshiki Iwai, Tetsuya Miyatake, Kenichi Kawaguchi, Yoshiyasu Doi, Shintaro Sato (Fujitsu) |
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14:20-14:25 |
Closing ( 5 min. ) |
| Announcement for Speakers |
| Invited Talk | Each speech will have 30 minutes for presentation and 10 minutes for discussion. |
| Contact Address and Latest Schedule Information |
| SDM |
Technical Committee on Silicon Device and Materials (SDM) [Latest Schedule]
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| Contact Address |
SDM Secretary: MORI Takahiro(National Institute of AIST)
Tel +81-29-849-1149
E-Mail   -    aist |
Last modified: 2021-12-20 15:56:29
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