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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
CPM |
2016-07-23 10:00 |
Ehime |
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Material conversion by heat treatment after the growth of GaAs nanowires Kohei Nishioka, Fumitaro Ishikawa (Ehime Univ.) CPM2016-28 |
[more] |
CPM2016-28 pp.19-20 |
ED, LQE, CPM |
2012-11-30 16:25 |
Osaka |
Osaka City University |
Study on inductively-coupled-plasma-dry-etching-mask for AlGaAs photonic crystal fabrication Yuji Togano, Yuta Kitabayashi, Fumitaro Ishikawa, Masahiko Kondow (Osaka Univ.) ED2012-90 CPM2012-147 LQE2012-118 |
We investigate inductively coupled plasma etching mask of Al-rich AlGaAs for photonic crystal (PC) fabrication. This stu... [more] |
ED2012-90 CPM2012-147 LQE2012-118 pp.117-120 |
ED |
2011-07-29 16:35 |
Niigata |
Multimedia system center, Nagaoka Univ. of Tech. |
Inductively coupled plasma etching of Al-rich AlGaAs for Photonic Crystal Fabrication Yuta Kitabayashi, Masaya Mochizuki, Fumitaro Ishikawa, Masahiko Kondow (Osaka Univ.) ED2011-44 |
We investigate inductively coupled plasma deep dry etching of Al$_{0.8}$Ga$_{0.2}$As for photonic crystal(PC)fabrication... [more] |
ED2011-44 pp.35-39 |
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