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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
 Results 1 - 6 of 6  /   
Committee Date Time Place Paper Title / Authors Abstract Paper #
OME 2021-12-27
15:10		 Okinawa Okinawaken Seinen Kaikan
(Primary: On-site, Secondary: Online)		 Drug development based on molecular self-assembly
Yukio Nagasaki (U. Tsukuba) OME2021-38		 At the end of the 19th century, Paul Ehrlich found that methylene blue stains only the nerve endings of rabbits, so he t... [more] OME2021-38
pp.9-14
CPM 2014-10-25
09:40		 Nagano   Characterization of low-temperature deposited SiNx films applicable to 3D/2.5D-IC
Mayumi B. Takeyama, Masaru Sato (Kitami Inst. of Tech.), Yasushi Kobayashi, Yoshihiro Nakata, Tomoji Nakamura (FUJITSU LAB.LTD.), Atsushi Noya (Kitami Inst. of Tech.) CPM2014-115		 3-dimensional stacked LSI and/or 2.5-D IC is attracted much attention to solve the issues how to develop the integration... [more] CPM2014-115
pp.53-56
CPM 2012-10-27
09:10		 Niigata   CuAlO2 film deposition by reactive sputtering using Cu/Al target prepared by Cold Spray method
Takuya Yokomoto, Takashi Arai, Takayuki Kosaka, Kazuki Okajima, Tomohiko Yamakami, Katsuya Abe, Kazuhiko Sakaki (Shinshu Univ.) CPM2012-104		 CuAlO2 film deposition was tried by reactive sputtering using Cu/Al targets
prepared by cold spray method.The Cu/Al ta... [more]		 CPM2012-104
pp.61-64
CPM 2011-10-26
13:00		 Fukui Fukui Univ. Structual characterization of CuAlO2 films deposited by reactive sputtering using composite target
Takuya Yokomoto, Yosuke Maeda, Takumi Miyazawa, Tomohiko Yamakami, Katsuya Abe (SinshuUniv.) CPM2011-109		 CuAlO2 films were prepared by reactive magnetron sputtering using Al-Cu hybrid targets
and these structural properties ... [more]		 CPM2011-109
pp.1-4
OME 2011-02-07
13:50		 Tokyo Kikai-Shinko-Kaikan Bldg. Application of Quartz Crystal Microbalance with Organic Thin Films prepared by Spin coat and RF Sputtering for Active Oxygen Monitoring
Hiroyuki Matsumoto, Kiyoshi Yoshino, Tatsuyuki Iwasaki, Shinobu Kinoshita (Iwasaki Electric), Kazutoshi Noda (AIST), Wataru Arai, Satoru Iwamori (Tokai Univ.) OME2010-70		 To investigate potential as an active oxygen monitor, fluorocarbon polymers prepared by a spin coating and RF sputtering... [more] OME2010-70
pp.11-14
CPM 2008-10-31
11:45		 Niigata Niigata Univ. Structure and photocatalytic properties of TiO2 films depopsited by high rate reactive sputtering.
Yoichi Hoshi, Taiki Ishihara, Tetsuya Sakai, Hao Lei (Tokyo Polytechnio Univ.), Hidehiko Shimizu (Niigata Univ.) CPM2008-88		 We reported that reactive sputtering by using two sputtering sources, one for the supply of Ti atoms and another for the... [more] CPM2008-88
pp.75-79
 Results 1 - 6 of 6  /   
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