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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
MWP, EMT, PN, LQE, OPE, EST, IEE-EMT [detail] |
2014-01-24 09:00 |
Kyoto |
Doshisha University |
Electromagnetic Simulation of High Resistance Silicon Substrate by Helium ion Irradiation Yuki Yao, Takuichi Hirano, Ning Li, Kenichi Okada, Akira Matsuzawa, Jiro Hirokawa, Makoto Ando (Tokyo Inst. of Tech.), Takeshi Inoue, Akinori Masaoka, Hitoshi Sakane (SEI) PN2013-61 OPE2013-175 LQE2013-161 EST2013-110 MWP2013-81 |
A helium(He)-3 ion bombardment technique has been proposed for creating locally high resistivity silicon substrate areas... [more] |
PN2013-61 OPE2013-175 LQE2013-161 EST2013-110 MWP2013-81 pp.181-185 |
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