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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM |
2016-10-26 14:00 |
Miyagi |
Niche, Tohoku Univ. |
[Invited Talk]
Controlling Metallic Contamination in Advanced ULSI Processing Koichiro Saga (Sony) SDM2016-69 |
Metal impurities dissolved in silicon can cause “recombination centers”, which degrade retention characteristics of DRAM... [more] |
SDM2016-69 pp.1-8 |
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