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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
LOIS, ICM |
2020-01-09 13:25 |
Nagasaki |
ARKAS SASEBO |
A Study on Efficiency Improvement of Picking Operation in Warehouse Akira Yonekawa (Hitachi), Morokuma Hidetoshi, Yamamoto Kazumi, Butsumoto Keisuke (HHT) ICM2019-31 LOIS2019-46 |
[more] |
ICM2019-31 LOIS2019-46 pp.7-12 |
SDM |
2010-02-05 16:45 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
Evaluation of Line-Edge Roughness in Cu/Low-k Interconnect Patterns Atsuko Yamaguchi, D. Ryuzaki, Kenichi Takeda (Hitachi), Hiroki Kawada (Hitachi High-Tech.) SDM2009-192 |
To establish the method for evaluating Cu/low-k interconnect line-edge roughness (LER), resist, low-k, and Cu/low-k samp... [more] |
SDM2009-192 pp.59-63 |
EMCJ |
2010-01-22 09:05 |
Okinawa |
University of the Ryukyus |
Low-Noise System Design for Electrostatic Deflection of Electron-beam Wen Li, Masami Makuuchi, Kengo Imagawa (PERL,HITACHI), Hiroyuki Takahashi, Yuusuke Ominami, Yasuhiro Gunji (Hitachi High-Technologies) EMCJ2009-111 |
High resolution beam control technology has been required from ion or electron beam lithography, inspection apparatus, m... [more] |
EMCJ2009-111 pp.75-80 |
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