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| Paper Abstract and Keywords | ||
| Presentation | 2006-08-07 15:25 Low temperature deposition of anatase poly TiO2 by chemical vapor deposition Fumihiko Hirose, Masashi Ito, Yu Matsushima (YU) Link to ES Tech. Rep. Archives:  CPM2006-44 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | We have successfully deposited antase TiO2 on Si surfaces by MOCVD with a precursor titaneisopropoxide and an oxidant of H2O2 vapor. The typical growth rate is 17A/s. The grown TiO2 exhibited photocatalytic activity. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | TiO2 / CVD / low temperature / crystal / photocatalytist / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 106, no. 203, CPM2006-44, pp. 21-23, Aug. 2006. | |
| Paper # | CPM2006-44 | |
| Date of Issue | 2006-07-31 (CPM) | |
| ISSN | Print edition: ISSN 0913-5685 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | Link to ES Tech. Rep. Archives: CPM2006-44 |
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| Conference Information | |
| Committee | CPM |
| Conference Date | 2006-08-07 - 2006-08-08 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Iwate Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Electronic Component Parts and Materials, etc. |
| Paper Information | |
| Registration To | CPM |
| Conference Code | 2006-08-CPM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low temperature deposition of anatase poly TiO2 by chemical vapor deposition |
| Sub Title (in English) | |
| Keyword(1) | TiO2 |
| Keyword(2) | CVD |
| Keyword(3) | low temperature |
| Keyword(4) | crystal |
| Keyword(5) | photocatalytist |
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| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Fumihiko Hirose |
| 1st Author's Affiliation | Ymagata University (YU) |
| 2nd Author's Name | Masashi Ito |
| 2nd Author's Affiliation | Ymagata University (YU) |
| 3rd Author's Name | Yu Matsushima |
| 3rd Author's Affiliation | Ymagata University (YU) |
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| Speaker | Author-1 |
| Date Time | 2006-08-07 15:25:00 |
| Presentation Time | 25 minutes |
| Registration for | CPM |
| Paper # | CPM2006-44 |
| Volume (vol) | vol.106 |
| Number (no) | no.203 |
| Page | pp.21-23 |
| #Pages | 3 |
| Date of Issue | 2006-07-31 (CPM) |
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