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Paper Abstract and Keywords
Presentation 2012-05-17 16:45
Preparation and evaluation of Ga2O3 oxygen sensors
Masaaki Isai, Takahiro Yamamoto, Takuma Tori (Shizuoka Univ.) ED2012-25 CPM2012-9 SDM2012-27
Abstract (in Japanese) (See Japanese page) 
(in English) Abstract Recently, from a point of environmental problems, oxygen gas sensors attract attention of controlling the exhaust gas. The Ga2O3 has an oxygen detection characteristic at more than 900℃, so this material attracts much attention as an oxygen sensor at high temperature. The β-Ga2O3 films were prepared by the RF magnetron sputtering method. The influence of the two kinds of substrates, namely Si (100) and quartz to compare on the oxygen detection properties was evaluated. It was found that the oxygen gas sensor fabricated on a quartz substrate had superior oxygen detection characteristics than that on a Si substrate..
Keyword (in Japanese) (See Japanese page) 
(in English) Gallium oxide / Metal oxides / Magnetron sputtering method / Rapid thermal annealing(RTA) / Oxygen sensor / / /  
Reference Info. IEICE Tech. Rep., vol. 112, no. 33, CPM2012-9, pp. 39-42, May 2012.
Paper # CPM2012-9 
Date of Issue 2012-05-10 (ED, CPM, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2012-25 CPM2012-9 SDM2012-27

Conference Information
Committee ED SDM CPM  
Conference Date 2012-05-17 - 2012-05-18 
Place (in Japanese) (See Japanese page) 
Place (in English) VBL, Toyohashi Univ. of Technol. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To CPM 
Conference Code 2012-05-ED-SDM-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Preparation and evaluation of Ga2O3 oxygen sensors 
Sub Title (in English)  
Keyword(1) Gallium oxide  
Keyword(2) Metal oxides  
Keyword(3) Magnetron sputtering method  
Keyword(4) Rapid thermal annealing(RTA)  
Keyword(5) Oxygen sensor  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Masaaki Isai  
1st Author's Affiliation Shizuoka University (Shizuoka Univ.)
2nd Author's Name Takahiro Yamamoto  
2nd Author's Affiliation Shizuoka University (Shizuoka Univ.)
3rd Author's Name Takuma Tori  
3rd Author's Affiliation Shizuoka University (Shizuoka Univ.)
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Speaker Author-1 
Date Time 2012-05-17 16:45:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # ED2012-25, CPM2012-9, SDM2012-27 
Volume (vol) vol.112 
Number (no) no.32(ED), no.33(CPM), no.34(SDM) 
Page pp.39-42 
#Pages 4 
Date of Issue 2012-05-10 (ED, CPM, SDM) 

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