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Paper Abstract and Keywords
Presentation 2013-06-21 16:55
ZnO film growth using high-energy H2O generated by a catalytic reaction -- Effect of low-temperature buffer layer --
Kazuki Takezawa, Tomoki Nakamura, Takahiro Oyanagi, Takahiro Kato (Nagaoka Univ. of Tech.), Hironori Katagiri, Koichiro Oishi, Kazuo Jimbo (Nagaoka. Nat. Coll. Technol.), Kanji Yasui (Nagaoka Univ. of Tech.) EMD2013-23 CPM2013-38 OME2013-46 Link to ES Tech. Rep. Archives: EMD2013-23 CPM2013-38 OME2013-46
Abstract (in Japanese) (See Japanese page) 
(in English) ZnO thin films were grown on glass substrates through a reaction between dimethylzinc and high-energy H2O. The latter was produced by a Pt-catalyzed H2O2 reaction. Although the ZnO films grown on a-sapphire substrates showed excellent electrical properties, those grown on glass substrates showed poor electrical properties. For the application of transparent conductive thin films, the improvement of the optical and electrical properties of the ZnO films on the glass substrates were tried by a insertion of low temperature buffer layer. Although crystal orientation along c-axis was not improved by the buffer layer, Hall mobility was improved. The improvement of the Hall mobility was correlated well with an empirical parameter E0 estimated from the absorption coefficients at sub-bandgap energy.
Keyword (in Japanese) (See Japanese page) 
(in English) ZnO / catalytic reaction / CVD / surface morphology / optical transmittance / Hall mobility / /  
Reference Info. IEICE Tech. Rep., vol. 113, no. 97, CPM2013-38, pp. 89-94, June 2013.
Paper # CPM2013-38 
Date of Issue 2013-06-14 (EMD, CPM, OME) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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Download PDF EMD2013-23 CPM2013-38 OME2013-46 Link to ES Tech. Rep. Archives: EMD2013-23 CPM2013-38 OME2013-46

Conference Information
Committee EMD CPM OME  
Conference Date 2013-06-21 - 2013-06-21 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Summer meeting for materials and devices 
Paper Information
Registration To CPM 
Conference Code 2013-06-EMD-CPM-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) ZnO film growth using high-energy H2O generated by a catalytic reaction 
Sub Title (in English) Effect of low-temperature buffer layer 
Keyword(1) ZnO  
Keyword(2) catalytic reaction  
Keyword(3) CVD  
Keyword(4) surface morphology  
Keyword(5) optical transmittance  
Keyword(6) Hall mobility  
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Keyword(8)  
1st Author's Name Kazuki Takezawa  
1st Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
2nd Author's Name Tomoki Nakamura  
2nd Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
3rd Author's Name Takahiro Oyanagi  
3rd Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
4th Author's Name Takahiro Kato  
4th Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
5th Author's Name Hironori Katagiri  
5th Author's Affiliation Nagaoka National College of Technologu (Nagaoka. Nat. Coll. Technol.)
6th Author's Name Koichiro Oishi  
6th Author's Affiliation Nagaoka National College of Technologu (Nagaoka. Nat. Coll. Technol.)
7th Author's Name Kazuo Jimbo  
7th Author's Affiliation Nagaoka National College of Technologu (Nagaoka. Nat. Coll. Technol.)
8th Author's Name Kanji Yasui  
8th Author's Affiliation Nagaoka University of Technology (Nagaoka Univ. of Tech.)
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Speaker Author-1 
Date Time 2013-06-21 16:55:00 
Presentation Time 20 minutes 
Registration for CPM 
Paper # EMD2013-23, CPM2013-38, OME2013-46 
Volume (vol) vol.113 
Number (no) no.96(EMD), no.97(CPM), no.98(OME) 
Page pp.89-94 
#Pages
Date of Issue 2013-06-14 (EMD, CPM, OME) 


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