Paper Abstract and Keywords |
Presentation |
2018-11-01 14:50
Consideration of bilayer film with Zn and AZO deposited by sputtering method Hidehiko Shimizu, Haruo Iwano, Takahiro Kawakami, Yasuo Fukushima, Koutaro Nagata, Nozomu Tsuboi (Niigata Univ.) CPM2018-45 Link to ES Tech. Rep. Archives: CPM2018-45 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
In order to preparation of Zn doped AZO film, deposition of AZO films on Zn films were attempted by dc magnetron sputtering method. As a result, when the substrate temperature was raised from the room temperature after Zn film was deposited on the glass substrate, a Zn film detached from a glass substrate. For this reason, it was difficulty that Zn doped AZO film was prepared by deposition of AZO films on Zn films. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
AZO / Zinc / Oxygen / Magnetron Sputtering / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 118, no. 276, CPM2018-45, pp. 21-24, Nov. 2018. |
Paper # |
CPM2018-45 |
Date of Issue |
2018-10-25 (CPM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
CPM2018-45 Link to ES Tech. Rep. Archives: CPM2018-45 |
Conference Information |
Committee |
CPM IEE-MAG |
Conference Date |
2018-11-01 - 2018-11-02 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Machinaka campus Nagaoka |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Functional materials (semiconductors, magnetic materials, dielectric materials, transparent conductors, semiconductors, etc.) Thin film processes / materials / devices, etc. |
Paper Information |
Registration To |
CPM |
Conference Code |
2018-11-CPM-MAG |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Consideration of bilayer film with Zn and AZO deposited by sputtering method |
Sub Title (in English) |
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Keyword(1) |
AZO |
Keyword(2) |
Zinc |
Keyword(3) |
Oxygen |
Keyword(4) |
Magnetron Sputtering |
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1st Author's Name |
Hidehiko Shimizu |
1st Author's Affiliation |
Niigata University (Niigata Univ.) |
2nd Author's Name |
Haruo Iwano |
2nd Author's Affiliation |
Niigata University (Niigata Univ.) |
3rd Author's Name |
Takahiro Kawakami |
3rd Author's Affiliation |
Niigata University (Niigata Univ.) |
4th Author's Name |
Yasuo Fukushima |
4th Author's Affiliation |
Niigata University (Niigata Univ.) |
5th Author's Name |
Koutaro Nagata |
5th Author's Affiliation |
Niigata University (Niigata Univ.) |
6th Author's Name |
Nozomu Tsuboi |
6th Author's Affiliation |
Niigata University (Niigata Univ.) |
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Speaker |
Author-1 |
Date Time |
2018-11-01 14:50:00 |
Presentation Time |
25 minutes |
Registration for |
CPM |
Paper # |
CPM2018-45 |
Volume (vol) |
vol.118 |
Number (no) |
no.276 |
Page |
pp.21-24 |
#Pages |
4 |
Date of Issue |
2018-10-25 (CPM) |
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