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Committee Date Time Place Paper Title / Authors Abstract Paper #
ED 2023-12-07
14:50		 Aichi WINC AICHI Fabrication of Hafnium Nitride Spindt-type Field Emitter Arrays by Triode High Power Pulsed Magnetron Sputtering
Shun Kondo (Seikei University/AIST), Takeo Nakano, Md. Suruz Mian (Seikei University), Masayoshi Nagao, Hiromasa Murata (AIST) ED2023-41		 We have been attempting to fabricate Spindt-type emitter using the triode high-power pulsed magnetron sputtering (t-HPPM... [more] ED2023-41
pp.11-14
ED 2018-10-24
14:25		 Tokyo   Effects of discharge gas species (Ar, Kr) on fabrication of Spindt type emitter cathode using high power pulsed magnetron sputtering
Hyuga Taniguchi, Kei Oya, Takeo Nakano (Seikei Univ.), Masayoshi Nagao, Hisashi Ohsaki, Katsuhisa Murakami (AIST) ED2018-27		 Spindt-type emitter is one of the vacuum electron sources prepared by semiconductor manufacturing technologies. On its f... [more] ED2018-27
pp.5-8
ED 2012-11-19
15:55		 Osaka Osaka Univ. Nakanoshima Center Spindt-emitter fabrication using sputtering deposition
Tomoya Yoshida, Masayoshi Nagao, Nobuko Koda, Takashi Nishi (AIST), Takeo Nakano (Seikei Univ.) ED2012-58		 A novel fabrication method of Spindt-type field emitter array will be presented. In our method, a double-layered photore... [more] ED2012-58
pp.19-23
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