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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM, ED 2008-07-10
10:55		 Hokkaido Kaderu２・７ Electrical Detection of Si-Tagged Proteins on HF-last Si(100) and Thermally Grown SiO2 Surfaces
S. Mahboob, Katsunori Makihara, Hirotaka Kaku, Mitsuhisa Ikeda, Seiichiro Higashi, Seiichi Miyazaki, Akio Kuroda (Hiroshima Univ.) ED2008-69 SDM2008-88		 We successfully detected silicon-binding proteins such as Si-tagged protein A, green fluorescent protein (GFP) and lucif... [more] ED2008-69 SDM2008-88
pp.155-158
SDM, ED 2008-07-11
13:35		 Hokkaido Kaderu２・７ Electrical Properties of Highly Crystallized Ge:H Thin Films Grown from VHF Inductively-Coupled Plasma of H2-diluted GeH4
Hirotaka Kaku, Katsunori Makihara, Mitsuhisa Ikeda, Seiichiro Higashi, Seiichi Miyazaki (Hiroshima Univ.) ED2008-90 SDM2008-109		 Formation of highly crystallized Ge films on quartz substrate from VHF-ICP of GeH4 and electrical properties of the film... [more] ED2008-90 SDM2008-109
pp.271-274
SDM 2007-12-14
13:30		 Nara Nara Institute Science and Technology In-situ Measurement of Temperature Variation in Si wafer During Millisecond Rapid Thermal Annealing
Hirokazu Furukawa, Seiichiro Higashi, Tatsuya Okada, Hirotaka Kaku, Hideki Murakami, Seiichi Miyazaki (Hiroshima Univ.) SDM2007-228		 In-situ measurement technique of temperature profile in Si wafer during millisecond rapid thermal annealing has been dev... [more] SDM2007-228
pp.27-29
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