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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM 2010-10-22
11:10		 Miyagi Tohoku University Evaluation of Internal Strain and Electron Mobility in poly-Si TFTs Formed by CW Laser Lateral Crystallization
Shuntaro Fujii, Shin-Ichiro Kuroki, Koji Kotani (Tohoku Univ.) SDM2010-162		 Tensile strain is induced in the polycrystalline silicon (poly-Si) films formed by CW laser lateral crystallization (CLC... [more] SDM2010-162
pp.41-44
SDM 2010-10-22
11:40		 Miyagi Tohoku University Fabrication of Highly Crystalline-Oriented Poly-Si Thin Films by using Double -Line-Beam CLC for High Performance LPTS-TFT
Shin-Ichiro Kuroki, Yuya Kawasaki, Shuntaro Fujii, Koji Kotani (Tohoku Univ.), Takashi Ito (Tokyo Inst. of Tech.) SDM2010-163		 Highly bi-axially oriented poly-Si thin films with very long grains were successfully fabricated on quartz substrates by... [more] SDM2010-163
pp.45-48
SDM 2008-10-09
14:30		 Miyagi Tohoku Univ. Planarization of CW laser crystallized Si thin films by chemical mechanical polishing using slurry with ethyl alcohol
Masayuki Numata, Shin-Ichiro Kuroki, Shuntaro Fujii, Koji Kotani, Takashi Ito (Tohoku Univ.) SDM2008-151		 CW laser crystallization of amorphous silicon films is a promising method to realize thin film transistor with high per... [more] SDM2008-151
pp.13-16
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