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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM |
2016-11-11 14:30 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
[Invited Talk]
Application of DFT Calculation for the Development of High Quality Si and Ge Substrates
-- From Ultra Large Diameter Crystal Pulling to Metal Gettering -- Koji Sueoka (Okayama Pref. Univ.) SDM2016-87 |
During the last decade, considerable progress has been made in understanding the properties and behavior of the vacancy ... [more] |
SDM2016-87 pp.49-54 |
SDM |
2016-10-26 14:00 |
Miyagi |
Niche, Tohoku Univ. |
[Invited Talk]
Controlling Metallic Contamination in Advanced ULSI Processing Koichiro Saga (Sony) SDM2016-69 |
Metal impurities dissolved in silicon can cause “recombination centers”, which degrade retention characteristics of DRAM... [more] |
SDM2016-69 pp.1-8 |
CPM |
2010-09-10 15:00 |
Tokyo |
Kikai-Shinko-Kaikan Bldg |
Fabrication of Si solar cells with low-purity Si including transition metals Satoru Tsuduki, Daiki Takeda, Yuki Sano, Takahiko Suzuki, Fumihiko Hirose (Yamagata Univ.) CPM2010-87 |
Production methods of poly Si solar cells were investigated with low purity Si containing transition metals of Cu, Ni, ... [more] |
CPM2010-87 pp.37-40 |
SDM |
2009-12-04 14:30 |
Nara |
NAIST |
Gettering in Large-Grained Thin Polycrystalline Silicon Films on Glass Substrate Akito Hara, Tsutomu Sato (Tohoku Gakuin Univ.) SDM2009-163 |
Gettering of metal impurities in thin poly-Si films is one of the key techniques for realizing high-performance, high-re... [more] |
SDM2009-163 pp.63-65 |
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