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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
OME |
2017-12-01 09:20 |
Saga |
Sun Messe Tosu |
High efficiency processing and its processing mechanism of large area diamond substrate due to plasma fusion CMP Hidetoshi Takeda (Namiki Precision Jewel Co., Ltd.), Toshiro Doi (Kyushu Univ.), Seong Woo Kim (Namiki Precision Jewel Co., Ltd.), Hideo Aida (Nagaoka Univ. Tech.), Masaharu Shiratani (Kyushu Univ.) OME2017-35 |
SiC, GaN and Diamond are known as next generation semiconductor materials, but on the other hand, these are known as ult... [more] |
OME2017-35 pp.1-6 |
CPM, LQE, ED |
2013-11-28 11:50 |
Osaka |
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Bow management of substrate for nitride semiconductor devices by internally focused laser processing
-- application to silicon substrate -- Natsuko Aota, Hideo Aida, Hidetoshi Takeda (Namiki Precision Jewel) ED2013-67 CPM2013-126 LQE2013-102 |
Bow management for heteroepitaxy of III-Nitride films on silicon substrate has been required, as substrate bow is introd... [more] |
ED2013-67 CPM2013-126 LQE2013-102 pp.17-20 |
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