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Technical Committee on Silicon Device and Materials (SDM) (Searched in: 2007)
Search Results: Keywords 'from:2007-10-04 to:2007-10-04'
| Committee | Date Time | Place | Paper Title / Authors | Abstract | Paper # | |
| SDM | 2007-10-04 13:00 |
Miyagi | Tohoku Univ. | Destruction Dynamics and Theoretical Design of MgO Protecting Layer in Plasma Momoji Kubo, Kazumi Serizawa, Hiromi Kikuchi, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio (Tohoku Univ.), Hiroshi Kajiyama, Tsutae Shinoda (Hiroshima Univ.), Akira Miyamoto (Tohoku Univ.)  SDM2007-170 |
Increment of stability of MgO protecting layer under the plasma condition is strongly demanded for the development of ne... [more] | SDM2007-170 pp.1-2 |
| SDM | 2007-10-04 13:25 |
Miyagi | Tohoku Univ. | Theoretical Prediction of Kinetic Properties of MgO by Molecular Dynamics Method Hiroaki Onuma, Kazumi Serizawa, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio (Tohoku Univ.), Hiroshi Kajiyama, Tsutae Shinoda (Hiroshima Univ.), Akira Miyamoto (Tohoku Univ.) SDM2007-171 |
Theoretical predictions of kinetic properties under interfaces and extreme conditions, such as high electric field or hi... [more] | SDM2007-171 pp.3-4 |
| SDM | 2007-10-04 13:50 |
Miyagi | Tohoku Univ. | A Computational Study on Electron Emission from MgO Protecting Layer for Plasma Display Panel. Kazumi Serizawa, Hiroaki Onuma, Hiromi Kikuchi, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio (Tohoku Univ.), Hiroshi Kajiyama, Tsutae Shinoda (Hiroshima Univ.), Akira Miyamoto (Tohoku Univ.) SDM2007-172 |
In order to reduce the operating power of plasma display panel, it is necessary to improve the efficiency of electron em... [more] | SDM2007-172 pp.5-6 |
| SDM | 2007-10-04 14:15 |
Miyagi | Tohoku Univ. | Analysis of Frictional Property of Diamond-like Carbon by New Molecular Dynamics Method Yusuke Morita, Aodun Qimuge, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.) SDM2007-173 |
Diamond-like carbon (DLC) films attract the special interest of its applications as surface coatings in electronics devi... [more] | SDM2007-173 pp.7-8 |
| SDM | 2007-10-04 14:40 |
Miyagi | Tohoku Univ. | Influence of Chemical Topology on the Electrical Properties of Carbon Black – A Theoretical Study Arunabhiram Chutia, Zhigang Zhu, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.) SDM2007-174 |
Present investigation is focused on the investigation of the dependence of electrical properties of carbon black on the ... [more] | SDM2007-174 pp.9-10 |
| SDM | 2007-10-04 15:15 |
Miyagi | Tohoku Univ. | Nitrogen Profile Study for SiON Gate Dielectrics of Advanced DRAM Shigemi Murakawa (Tokyo Electron/Tohoku Univ.), Masashi Takeuchi, Minoru Honda, Shu-ichi Ishizuka, Toshio Nakanishi, Yoshihiro Hirota, Takuya Sugawara, Yoshitsugu Tanaka, Yasushi Akasaka (Tokyo Electron AT), Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.) SDM2007-175 |
Nitrogen profile variations were systematically studied for the DRAM plasma nitridation process, using AR-XPS, and their... [more] | SDM2007-175 pp.11-14 |
| SDM | 2007-10-04 15:40 |
Miyagi | Tohoku Univ. | Development of multi-scale tunnel current simulator Hideyuki Tsuboi, Kazumi Serizawa, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Ｄｅｌ Calpio Carlos (Tohoku Univ.), Hiroshi Kajiyama, Tsutae Shinoda (Hiroshima Univ.), Akira Miyamoto (Tohoku Univ.) SDM2007-176 |
When developing electronic devices for display, nano-scale materials, information on their electron emission at the quan... [more] | SDM2007-176 pp.15-16 |
| SDM | 2007-10-04 16:05 |
Miyagi | Tohoku Univ. | Development of Multi-Scale Electrical Conductivity Simulator with the Joule Heating Module and its Application to Polycrystalline SiO2 John Paul Yacapin, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.) SDM2007-177 |
This work presents the development of a multi-scale electrical conductivity simulator with the effect of Joule heating t... [more] | SDM2007-177 pp.17-18 |
| SDM | 2007-10-04 16:30 |
Miyagi | Tohoku Univ. | Ultrathin HfOxNy gate insulator formations utilizing ECR plasma process Yusuke Nakano, Masaki Satoh, Shun-ichiro Ohmi (Tokyo Tech) SDM2007-178 |
Post deposition annealing (PDA) process such as rapid cooling process was investigated to improve electrical characteris... [more] | SDM2007-178 pp.19-22 |
| SDM | 2007-10-04 16:55 |
Miyagi | Tohoku Univ. | Modulation of Dielectric Constant on Mechanically Strained SrTiO3 MIM Capacitor Shin-Ichiro Kuroki, Koji Kotani, Takashi Ito (Tohoku Univ.) SDM2007-179 |
The effect of tensile strain on SrTiO3 high-k insulator was discussed. The tensile strain on SrTiO3 thin films increased... [more] | SDM2007-179 pp.23-24 |
| SDM | 2007-10-05 09:30 |
Miyagi | Tohoku Univ. | Theoretic Study of Electronic and Electrical Properties for Nano-Structural ZnO Zhigang Zhu, Arunabhiram Chutia, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) SDM2007-180 |
[more] | SDM2007-180 pp.25-26 |
| SDM | 2007-10-05 09:55 |
Miyagi | Tohoku Univ. | Tight-Binding Quantum Chemical Molecular Dynamics Study on Interfacial Electron Transfer in Dye-Sensitized Anatase (001) Surface Chen Lv, Agalya Govindasamy, Kei Ogiya, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.) SDM2007-181 |
[more] | SDM2007-181 pp.27-28 |
| SDM | 2007-10-05 10:20 |
Miyagi | Tohoku Univ. | A Quantum Chemical Molecular Dynamics Study on Formation Process of Diamond-Like Carbon Film Aodun Qimuge, Yusuke Morita, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.) SDM2007-182 |
Diamond-like carbon (DLC) films are widely used as the coating materials in sliding parts. Because they show low frictio... [more] | SDM2007-182 pp.29-30 |
| SDM | 2007-10-05 10:55 |
Miyagi | Tohoku Univ. | The Evaluation of New Amorphous Hydrocarbon Film aCHx, for Low-k Copper Barrier Film Hiraku Ishikawa (Tokyo Electron/Tohoku Univ.), Toshihisa Nozawa, Takaaki Matsuoka (Tokyo Electron Technology Development Institute), Akinobu Teramoto, Masaki Hirayama, Takashi Ito, Tadahiro Ohmi (Tohoku Univ.) SDM2007-183 |
In recent ULSI, Cu wiring and low-k dielectrics are used to reduce RC delay in interconnect. In order to increase operat... [more] | SDM2007-183 pp.31-34 |
| SDM | 2007-10-05 11:20 |
Miyagi | Tohoku Univ. | Development of a high efficiency Fluorocarbon abatement system utilizing plasma and Ca(OH)2/CaO under a decompression atmosphere Katsumasa Suzuki, Yoshio Ishihara, Kaoru Sakoda (Taiyo Nippon Sanso Corp.), Yasuyuki Shirai, Masaki Hirayama, Akinobu Teramoto, Tadahiro Ohmi (NICHe), Takayuki Watanabe (Ube Material Industries, Ltd.) SDM2007-184 |
[more] | SDM2007-184 pp.35-38 |
| SDM | 2007-10-05 11:45 |
Miyagi | Tohoku Univ. | Development of Multi-scale Simulator for Dye-sensitized Solar Cells Kei Ogiya, Chen Lv, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.) SDM2007-185 |
[more] | SDM2007-185 pp.39-40 |
| SDM | 2007-10-05 13:10 |
Miyagi | Tohoku Univ. | High Mobility Bottom Gate Microcrystalline Si TFT Fabricated by Microwave Plasma CVD Akihiko Hiroe, Akinobu Teramoto, Tadahiro Ohmi (Tohoku Univ.) SDM2007-186 |
c-Si has been deposited by microwave (2.45GHz) plasma CVD. (220) preferentially oriented film and (111) preferen... [more] | SDM2007-186 pp.41-44 |
| SDM | 2007-10-05 13:35 |
Miyagi | Tohoku Univ. | High Performance Accumulation Mode FD-SOI MOSFETs on Si(100) and (110) Surfaces Weitao Cheng, Akinobu Teramoto, Rihito Kuroda, Chingfoa Tye, Syunichi Watabe, Tomoyuki Suwa, Tetsuya Goto, Fuminobu Imaizumi, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.) SDM2007-187 |
[more] | SDM2007-187 pp.45-48 |
| SDM | 2007-10-05 14:00 |
Miyagi | Tohoku Univ. | A Study on Improvement of Uniformity for SOI/BOX Layer Formation by SBSI Process Kouki Notake, Yuichiro Suda, Shun-ichiro Ohmi (Tokyo Tech) SDM2007-188 |
A selective etching of SiGe layers for Si/SiGe/Si(100) layers has been investigated to reduce damage of Si surfaces. It ... [more] | SDM2007-188 pp.49-52 |
| SDM | 2007-10-05 14:25 |
Miyagi | Tohoku Univ. | Work Function Modulation of PtSi Alloying with Hf Shun-ichiro Ohmi, Jun Gao, Yusuke Nakano (Tokyo Tech) SDM2007-189 |
Work function modulation of PtSi by alloying with Hf was investigated. When a silicidation of Pt/Hf/n-Si(100) was carrie... [more] | SDM2007-189 pp.53-56 |
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