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 Conference Papers (Available on Advance Programs)  (Sort by: Date Descending)
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Committee Date Time Place Paper Title / Authors Abstract Paper #
SDM, OME 2021-04-23
14:20
Okinawa Okinawaken Seinen Kaikan
(Primary: On-site, Secondary: Online)
Issue of crystallization for LTPS TFT
Noguchi Takashi, OkadaTatsuya (Univ. Ryukyus) SDM2021-3 OME2021-3
Abstract

Currently, poly Si TFTs are mounted on glass and are adopted for display panel s such as smart-phone,
elect... [more]
SDM2021-3 OME2021-3
pp.13-14
SDM, OME 2020-04-13
14:00
Okinawa Okinawaken Seinen Kaikan
(Cancelled, technical report was not issued)
Metal Source/Drain Structure TFTs using poly-Si Crystallized by Blue Multi-Laser Diode Annealing
Tatsuya Okada, Takashi Noguchi (Univ. Ryukyus)
We have reported that Blue Multi-Laser Diode Annealing (BLDA) is effective to crystallize Si films with smooth surface. ... [more]
SDM, OME 2020-04-13
14:50
Okinawa Okinawaken Seinen Kaikan
(Cancelled, technical report was not issued)
Issues for crystallization of SI films
Noguchi Takashi, Okada Tatsuya (Univ. Ryukyus)
(To be available after the conference date) [more]
SDM, OME 2012-04-28
11:50
Okinawa Okinawa-Ken-Seinen-Kaikan Bldg. Crystallization of the Sputtered P-doped Si Films for High Performance Poly-Si TFT
Takuma Nishinohara, J. D. Mugiraneza, Katsuya Shirai, Toshiharu Suzuki, Tatsuya Okada, Takashi Noguchi (Univ. of the Ryukyus), Tadashi Ohachi (Doshisha Univ.), Hideki Matsushima, Takao Hashimoto, Yoshiaki Ogino, Eiji Sahota (Hitachi CP) SDM2012-18 OME2012-18
After performing BLDA for phosphorus-doped Si films deposited by sputtering using Ne gas, the crystallinity of the films... [more] SDM2012-18 OME2012-18
pp.79-82
 Results 1 - 4 of 4  /   
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