|
|
| Chair |
|
Tanemasa Asano (Kyushu Univ.) |
| Vice Chair |
|
Toshihiro Sugii (Fujitsu) |
| Secretary |
|
Shigeru Kawanaka (Toshiba), Hisahiro Anzai (Sony) |
| Assistant |
|
Syunichiro Ohmi (Tokyo Inst. of Tech.) |
|
| Conference Date |
Thu, Oct 4, 2007 13:00 - 17:20
Fri, Oct 5, 2007 09:30 - 16:40 |
| Topics |
Process Science and Novel Process Technologies |
| Conference Place |
New Industry Creation Hatchery Center, tohoku University |
| Address |
6-6-10 Aza-Aoba, Aramaki, Aoba-ku, Sendai, 980-8579 Japan |
| Transportation Guide |
By taking Bus from Sendai station, BUS pool #9, please ride on "Doubutsukouen JUNKAN", "MIYAKYO-DAI" or "AOBA-DAI". The nearest BUS stop for the FFF is "JOUHOUKAGAKUKENKYUUKA MAE（Graduate School of Information Sciences）"
http://www.fff.niche.tohoku.ac.jp/en/index.php?%5B%5BMap%5D%5D |
Contact
Person |
Akinobu Teramoto
022-795-3977 |
| Announcement |
Please join us for a reception after session on Oct. 4. |
Copyright
and
reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Thu, Oct 4 PM
13:00 - 17:20 |
| (1) |
13:00-13:25 |
Destruction Dynamics and Theoretical Design of MgO Protecting Layer in Plasma  SDM2007-170 |
Momoji Kubo, Kazumi Serizawa, Hiromi Kikuchi, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio (Tohoku Univ.), Hiroshi Kajiyama, Tsutae Shinoda (Hiroshima Univ.), Akira Miyamoto (Tohoku Univ.) |
| (2) |
13:25-13:50 |
Theoretical Prediction of Kinetic Properties of MgO by Molecular Dynamics Method SDM2007-171 |
Hiroaki Onuma, Kazumi Serizawa, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio (Tohoku Univ.), Hiroshi Kajiyama, Tsutae Shinoda (Hiroshima Univ.), Akira Miyamoto (Tohoku Univ.) |
| (3) |
13:50-14:15 |
A Computational Study on Electron Emission from MgO Protecting Layer for Plasma Display Panel. SDM2007-172 |
Kazumi Serizawa, Hiroaki Onuma, Hiromi Kikuchi, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio (Tohoku Univ.), Hiroshi Kajiyama, Tsutae Shinoda (Hiroshima Univ.), Akira Miyamoto (Tohoku Univ.) |
| (4) |
14:15-14:40 |
Analysis of Frictional Property of Diamond-like Carbon by New Molecular Dynamics Method SDM2007-173 |
Yusuke Morita, Aodun Qimuge, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.) |
| (5) |
14:40-15:05 |
Influence of Chemical Topology on the Electrical Properties of Carbon Black – A Theoretical Study SDM2007-174 |
Arunabhiram Chutia, Zhigang Zhu, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.) |
| |
15:05-15:15 |
Break ( 10 min. ) |
| (6) |
15:15-15:40 |
Nitrogen Profile Study for SiON Gate Dielectrics of Advanced DRAM SDM2007-175 |
Shigemi Murakawa (Tokyo Electron/Tohoku Univ.), Masashi Takeuchi, Minoru Honda, Shu-ichi Ishizuka, Toshio Nakanishi, Yoshihiro Hirota, Takuya Sugawara, Yoshitsugu Tanaka, Yasushi Akasaka (Tokyo Electron AT), Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.) |
| (7) |
15:40-16:05 |
Development of multi-scale tunnel current simulator SDM2007-176 |
Hideyuki Tsuboi, Kazumi Serizawa, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Ｄｅｌ Calpio Carlos (Tohoku Univ.), Hiroshi Kajiyama, Tsutae Shinoda (Hiroshima Univ.), Akira Miyamoto (Tohoku Univ.) |
| (8) |
16:05-16:30 |
Development of Multi-Scale Electrical Conductivity Simulator with the Joule Heating Module and its Application to Polycrystalline SiO2 SDM2007-177 |
John Paul Yacapin, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.) |
| (9) |
16:30-16:55 |
Ultrathin HfOxNy gate insulator formations utilizing ECR plasma process SDM2007-178 |
Yusuke Nakano, Masaki Satoh, Shun-ichiro Ohmi (Tokyo Tech) |
| (10) |
16:55-17:20 |
Modulation of Dielectric Constant on Mechanically Strained SrTiO3 MIM Capacitor SDM2007-179 |
Shin-Ichiro Kuroki, Koji Kotani, Takashi Ito (Tohoku Univ.) |
Fri, Oct 5 AM
09:30 - 16:40 |
| (11) |
09:30-09:55 |
Theoretic Study of Electronic and Electrical Properties for Nano-Structural ZnO SDM2007-180 |
Zhigang Zhu, Arunabhiram Chutia, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.) |
| (12) |
09:55-10:20 |
Tight-Binding Quantum Chemical Molecular Dynamics Study on Interfacial Electron Transfer in Dye-Sensitized Anatase (001) Surface SDM2007-181 |
Chen Lv, Agalya Govindasamy, Kei Ogiya, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.) |
| (13) |
10:20-10:45 |
A Quantum Chemical Molecular Dynamics Study on Formation Process of Diamond-Like Carbon Film SDM2007-182 |
Aodun Qimuge, Yusuke Morita, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.) |
| |
10:45-10:55 |
Break ( 10 min. ) |
| (14) |
10:55-11:20 |
The Evaluation of New Amorphous Hydrocarbon Film aCHx, for Low-k Copper Barrier Film SDM2007-183 |
Hiraku Ishikawa (Tokyo Electron/Tohoku Univ.), Toshihisa Nozawa, Takaaki Matsuoka (Tokyo Electron Technology Development Institute), Akinobu Teramoto, Masaki Hirayama, Takashi Ito, Tadahiro Ohmi (Tohoku Univ.) |
| (15) |
11:20-11:45 |
Development of a high efficiency Fluorocarbon abatement system utilizing plasma and Ca(OH)2/CaO under a decompression atmosphere SDM2007-184 |
Katsumasa Suzuki, Yoshio Ishihara, Kaoru Sakoda (Taiyo Nippon Sanso Corp.), Yasuyuki Shirai, Masaki Hirayama, Akinobu Teramoto, Tadahiro Ohmi (NICHe), Takayuki Watanabe (Ube Material Industries, Ltd.) |
| (16) |
11:45-12:10 |
Development of Multi-scale Simulator for Dye-sensitized Solar Cells SDM2007-185 |
Kei Ogiya, Chen Lv, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.) |
| |
12:10-13:10 |
Lunch Break ( 60 min. ) |
| (17) |
13:10-13:35 |
High Mobility Bottom Gate Microcrystalline Si TFT Fabricated by Microwave Plasma CVD SDM2007-186 |
Akihiko Hiroe, Akinobu Teramoto, Tadahiro Ohmi (Tohoku Univ.) |
| (18) |
13:35-14:00 |
High Performance Accumulation Mode FD-SOI MOSFETs on Si(100) and (110) Surfaces SDM2007-187 |
Weitao Cheng, Akinobu Teramoto, Rihito Kuroda, Chingfoa Tye, Syunichi Watabe, Tomoyuki Suwa, Tetsuya Goto, Fuminobu Imaizumi, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.) |
| (19) |
14:00-14:25 |
A Study on Improvement of Uniformity for SOI/BOX Layer Formation by SBSI Process SDM2007-188 |
Kouki Notake, Yuichiro Suda, Shun-ichiro Ohmi (Tokyo Tech) |
| (20) |
14:25-14:50 |
Work Function Modulation of PtSi Alloying with Hf SDM2007-189 |
Shun-ichiro Ohmi, Jun Gao, Yusuke Nakano (Tokyo Tech) |
| |
14:50-15:00 |
Break ( 10 min. ) |
| (21) |
15:00-15:25 |
Atomic order flatting technology of silicon surface SDM2007-190 |
Tomoyuki Suwa, Rihito Kuroda, Akinobu Teramoto, Tadahiro Ohmi (Tohoku Univ.) |
| (22) |
15:25-15:50 |
Shallow Junction Formation Using Combination of LSA and Spike-RTA SDM2007-191 |
Seiichi Endo, Yoshiki Maruyama, Yoji Kawasaki, Tomohiro Yamashita, Hidekazu Oda, Yasuo Inoue (Renesas) |
| (23) |
15:50-16:15 |
Statistical Evaluation of Random Telegraph Signal Using a Very Large-scale Array TEG SDM2007-192 |
Kenichi Abe, Shigetoshi Sugawa, Rihito Kuroda, Syunichi Watabe, Akinobu Teramoto, Tadahiro Ohmi (Tohoku Univ.) |
| (24) |
16:15-16:40 |
Statistical Evaluation of Characteristics Variability caused by Plasma Processes SDM2007-193 |
Syunichi Watabe, Shigetoshi Sugawa, Kenichi Abe, Takafumi Fujisawa, Naoto Miyamoto, Akinobu Teramoto, Tadahiro Ohmi (Tohoku Univ.) |
| Announcement for Speakers |
| General Talk (25) | Each speech will have 20 minutes for presentation and 5 minutes for discussion. |
| Contact Address and Latest Schedule Information |
| SDM |
Technical Committee on Silicon Device and Materials (SDM) [Latest Schedule]
|
| Contact Address |
Yasushiro Nishioka (Nihon University, College of Science and Technology)
TEL047-469-6482,FAX047-467-9504
E- :    e   t n-u ,a  cmsk  |
Last modified: 2007-08-12 14:46:13
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