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All Technical Committee Conferences (Searched in: All Years)
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Search Results: Conference Papers |
Conference Papers (Available on Advance Programs) (Sort by: Date Descending) |
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Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
SDM |
2011-10-21 09:50 |
Miyagi |
Tohoku Univ. (Niche) |
Channel strain measurements in 32nm-node CMOSFETs Munehisa Takei, Hiroki Hashiguchi, Takuya Yamaguchi, Daisuke Kosemura, Kohki Nagata, Atsushi Ogura (Meiji Univ.) SDM2011-104 |
We performed strain analyses for 32-nm-node MPU by Raman measurements in conjunction with TEM observation. The channel s... [more] |
SDM2011-104 pp.43-48 |
SDM |
2010-10-21 14:00 |
Miyagi |
Tohoku University |
[Invited Talk]
Channel strain evaluation for advanced LSI Atsushi Ogura, Daisuke Kosemura, Munehisa Takei, Motohiro Tomita (Meiji Univ.) SDM2010-152 |
[more] |
SDM2010-152 pp.1-6 |
SDM |
2010-10-21 15:00 |
Miyagi |
Tohoku University |
Stress Tensor Measurements using Raman Spectroscopy with High-NA Oil-Immersion Lens Daisuke Kosemura, Atsushi Ogura (Meiji Univ.) SDM2010-153 |
Raman spectroscopy allows us to precisely evaluate stress with relatively high-spatial resolution and non-destructively.... [more] |
SDM2010-153 pp.7-12 |
SDM |
2010-10-22 16:20 |
Miyagi |
Tohoku University |
Strain evaluation in Si at atomically flat SiO2/Si interface Maki Hattori (Meiji Univ.), Daisuke Kosemura (Meiji Univ./JSPS), Munehisa Takei, Kohki Nagata, Hiroaki Akamatsu, Motohiro Tomita, Yuuki Mizukami, Yuuki Hashiguchi, Takuya Yamaguchi, Atsushi Ogura (Meiji Univ.), Tomoyuki Suwa, Akinobu Teramoto, Takeo Hattori, Tadahiro Ohmi (NICHe), Tomoyuki Koganezawa (JASRI) SDM2010-170 |
We performed Raman spectroscopy and in-plane XRD measurement to clarify the structure and strain in Si at and near an at... [more] |
SDM2010-170 pp.71-75 |
SDM |
2008-06-10 09:30 |
Tokyo |
An401・402, Inst. Indus. Sci., The Univ. of Tokyo |
Transconductance enhancement of strained-Si nanowire FETs Aya Seike, Tomoyuki Tange, Itsutaku Sano, Yuuki Sugiura, Ikushin Tsuchida, Hiromichi Ohta, Takanobu Watanabe (Waseda Univ.), Daisuke Kosemura, Atsushi Ogura (Meiji Univ.), Iwao Ohdomari (Waseda Univ.) SDM2008-48 |
We have demonstrated improved performance for Si nanowire FETs for CMOS operation by introducing tensile stress into the... [more] |
SDM2008-48 pp.35-39 |
SDM, OME |
2008-04-11 11:25 |
Okinawa |
Okinawa Seinen Kaikan |
Evaluation of stress and crystallinity of laser crystallization polysilicon thin film using UV/Visible Raman spectroscopy Yasuto Kakemura, Daisuke Kosemura, Atsushi Ogura (Meiji Univ.), Takashi Noguchi (Univ. of the Ryukyus) SDM2008-6 OME2008-6 |
Low temperature polysilicon (LTPS) thin film is a key material for the systems-on-glass achievement. Depth and in-plane ... [more] |
SDM2008-6 OME2008-6 pp.27-32 |
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