Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380
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SDM2007-170
Destruction Dynamics and Theoretical Design of MgO Protecting Layer in Plasma
Momoji Kubo, Kazumi Serizawa, Hiromi Kikuchi, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio (Tohoku Univ.), Hiroshi Kajiyama, Tsutae Shinoda (Hiroshima Univ.), Akira Miyamoto (Tohoku Univ.)
pp. 1 - 2
SDM2007-171
Theoretical Prediction of Kinetic Properties of MgO by Molecular Dynamics Method
Hiroaki Onuma, Kazumi Serizawa, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio (Tohoku Univ.), Hiroshi Kajiyama, Tsutae Shinoda (Hiroshima Univ.), Akira Miyamoto (Tohoku Univ.)
pp. 3 - 4
SDM2007-172
A Computational Study on Electron Emission from MgO Protecting Layer for Plasma Display Panel.
Kazumi Serizawa, Hiroaki Onuma, Hiromi Kikuchi, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio (Tohoku Univ.), Hiroshi Kajiyama, Tsutae Shinoda (Hiroshima Univ.), Akira Miyamoto (Tohoku Univ.)
pp. 5 - 6
SDM2007-173
Analysis of Frictional Property of Diamond-like Carbon by New Molecular Dynamics Method
Yusuke Morita, Aodun Qimuge, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.)
pp. 7 - 8
SDM2007-174
Influence of Chemical Topology on the Electrical Properties of Carbon Black – A Theoretical Study
Arunabhiram Chutia, Zhigang Zhu, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.)
pp. 9 - 10
SDM2007-175
Nitrogen Profile Study for SiON Gate Dielectrics of Advanced DRAM
Shigemi Murakawa (Tokyo Electron/Tohoku Univ.), Masashi Takeuchi, Minoru Honda, Shu-ichi Ishizuka, Toshio Nakanishi, Yoshihiro Hirota, Takuya Sugawara, Yoshitsugu Tanaka, Yasushi Akasaka (Tokyo Electron AT), Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.)
pp. 11 - 14
SDM2007-176
Development of multi-scale tunnel current simulator
Hideyuki Tsuboi, Kazumi Serizawa, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Ｄｅｌ Calpio Carlos (Tohoku Univ.), Hiroshi Kajiyama, Tsutae Shinoda (Hiroshima Univ.), Akira Miyamoto (Tohoku Univ.)
pp. 15 - 16
SDM2007-177
Development of Multi-Scale Electrical Conductivity Simulator with the Joule Heating Module and its Application to Polycrystalline SiO2
John Paul Yacapin, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.)
pp. 17 - 18
SDM2007-178
Ultrathin HfOxNy gate insulator formations utilizing ECR plasma process
Yusuke Nakano, Masaki Satoh, Shun-ichiro Ohmi (Tokyo Tech)
pp. 19 - 22
SDM2007-179
Modulation of Dielectric Constant on Mechanically Strained SrTiO3 MIM Capacitor
Shin-Ichiro Kuroki, Koji Kotani, Takashi Ito (Tohoku Univ.)
pp. 23 - 24
SDM2007-180
Theoretic Study of Electronic and Electrical Properties for Nano-Structural ZnO
Zhigang Zhu, Arunabhiram Chutia, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Carlos A. Del Carpio, Momoji Kubo, Akira Miyamoto (Tohoku Univ.)
pp. 25 - 26
SDM2007-181
Tight-Binding Quantum Chemical Molecular Dynamics Study on Interfacial Electron Transfer in Dye-Sensitized Anatase (001) Surface
Chen Lv, Agalya Govindasamy, Kei Ogiya, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.)
pp. 27 - 28
SDM2007-182
A Quantum Chemical Molecular Dynamics Study on Formation Process of Diamond-Like Carbon Film
Aodun Qimuge, Yusuke Morita, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.)
pp. 29 - 30
SDM2007-183
The Evaluation of New Amorphous Hydrocarbon Film aCHx, for Low-k Copper Barrier Film
Hiraku Ishikawa (Tokyo Electron/Tohoku Univ.), Toshihisa Nozawa, Takaaki Matsuoka (Tokyo Electron Technology Development Institute), Akinobu Teramoto, Masaki Hirayama, Takashi Ito, Tadahiro Ohmi (Tohoku Univ.)
pp. 31 - 34
SDM2007-184
Development of a high efficiency Fluorocarbon abatement system utilizing plasma and Ca(OH)2/CaO under a decompression atmosphere
Katsumasa Suzuki, Yoshio Ishihara, Kaoru Sakoda (Taiyo Nippon Sanso Corp.), Yasuyuki Shirai, Masaki Hirayama, Akinobu Teramoto, Tadahiro Ohmi (NICHe), Takayuki Watanabe (Ube Material Industries, Ltd.)
pp. 35 - 38
SDM2007-185
Development of Multi-scale Simulator for Dye-sensitized Solar Cells
Kei Ogiya, Chen Lv, Ai Suzuki, Riadh Sahnoun, Michihisa Koyama, Hideyuki Tsuboi, Nozomu Hatakeyama, Akira Endou, Hiromitsu Takaba, Momoji Kubo, Carlos A. Del Carpio, Akira Miyamoto (Tohoku Univ.)
pp. 39 - 40
SDM2007-186
High Mobility Bottom Gate Microcrystalline Si TFT Fabricated by Microwave Plasma CVD
Akihiko Hiroe, Akinobu Teramoto, Tadahiro Ohmi (Tohoku Univ.)
pp. 41 - 44
SDM2007-187
High Performance Accumulation Mode FD-SOI MOSFETs on Si(100) and (110) Surfaces
Weitao Cheng, Akinobu Teramoto, Rihito Kuroda, Chingfoa Tye, Syunichi Watabe, Tomoyuki Suwa, Tetsuya Goto, Fuminobu Imaizumi, Shigetoshi Sugawa, Tadahiro Ohmi (Tohoku Univ.)
pp. 45 - 48
SDM2007-188
A Study on Improvement of Uniformity for SOI/BOX Layer Formation by SBSI Process
Kouki Notake, Yuichiro Suda, Shun-ichiro Ohmi (Tokyo Tech)
pp. 49 - 52
SDM2007-189
Work Function Modulation of PtSi Alloying with Hf
Shun-ichiro Ohmi, Jun Gao, Yusuke Nakano (Tokyo Tech)
pp. 53 - 56
SDM2007-190
Atomic order flatting technology of silicon surface
Tomoyuki Suwa, Rihito Kuroda, Akinobu Teramoto, Tadahiro Ohmi (Tohoku Univ.)
pp. 57 - 59
SDM2007-191
Shallow Junction Formation Using Combination of LSA and Spike-RTA
Seiichi Endo, Yoshiki Maruyama, Yoji Kawasaki, Tomohiro Yamashita, Hidekazu Oda, Yasuo Inoue (Renesas)
pp. 61 - 64
SDM2007-192
Statistical Evaluation of Random Telegraph Signal Using a Very Large-scale Array TEG
Kenichi Abe, Shigetoshi Sugawa, Rihito Kuroda, Syunichi Watabe, Akinobu Teramoto, Tadahiro Ohmi (Tohoku Univ.)
pp. 65 - 68
SDM2007-193
Statistical Evaluation of Characteristics Variability caused by Plasma Processes
Syunichi Watabe, Shigetoshi Sugawa, Kenichi Abe, Takafumi Fujisawa, Naoto Miyamoto, Akinobu Teramoto, Tadahiro Ohmi (Tohoku Univ.)
pp. 69 - 72
Note: Each article is a technical report without peer review, and its polished version will be published elsewhere.