Committee |
Date Time |
Place |
Paper Title / Authors |
Abstract |
Paper # |
CPM |
2013-10-25 11:50 |
Niigata |
Niigata Univ. Satellite Campus TOKIMEITO |
Preparation of carbon thin films by gas flow sputtering in high-density plasma Takuma Ishii, Yuji Satou, Takaharu Watanabe, Kiyoshi Ishii, Hiroshi Sakuma (Utsunomiya Univ.) CPM2013-107 |
High-quality diamond thin films are successfully obtained by plasma-assisted CVD. On the other hand, carbon films with a... [more] |
CPM2013-107 pp.67-71 |
EST, MWP, OPE, MW, EMT, IEE-EMT [detail] |
2013-07-18 11:25 |
Hokkaido |
Wakkanai Synthesis Cultural Center |
Trial Fabrication of 180 GHz-Band PTFE-Filled Waveguide by SR Etching and Its Evaluation Mitsuyoshi Kishihara (Okayama Pref. Univ.), Hideki Kido, Akinobu Yamaguchi, Yuichi Utsumi, Isao Ohta (Univ. of Hyogo) MW2013-64 OPE2013-33 EST2013-28 MWP2013-23 |
This paper describes trial fabrication of a PTFE-filled waveguide for 180 GHz-band operation with the use of the SR (syn... [more] |
MW2013-64 OPE2013-33 EST2013-28 MWP2013-23 pp.103-108 |
CPM |
2012-10-27 09:10 |
Niigata |
|
CuAlO2 film deposition by reactive sputtering using Cu/Al target prepared by Cold Spray method Takuya Yokomoto, Takashi Arai, Takayuki Kosaka, Kazuki Okajima, Tomohiko Yamakami, Katsuya Abe, Kazuhiko Sakaki (Shinshu Univ.) CPM2012-104 |
CuAlO2 film deposition was tried by reactive sputtering using Cu/Al targets
prepared by cold spray method.The Cu/Al ta... [more] |
CPM2012-104 pp.61-64 |
ED, SDM, CPM |
2012-05-17 16:45 |
Aichi |
VBL, Toyohashi Univ. of Technol. |
Preparation and evaluation of Ga2O3 oxygen sensors Masaaki Isai, Takahiro Yamamoto, Takuma Tori (Shizuoka Univ.) ED2012-25 CPM2012-9 SDM2012-27 |
Abstract Recently, from a point of environmental problems, oxygen gas sensors attract attention of controlling the exha... [more] |
ED2012-25 CPM2012-9 SDM2012-27 pp.39-42 |
ED, SDM, CPM |
2012-05-18 14:50 |
Aichi |
VBL, Toyohashi Univ. of Technol. |
Preparation and evaluation of LiMn2O4 films prepared by sputtering method Akio Niwa, Masaaki Isai, Mitsuhiro Nakamura, Takashi Noguchi (Shizuoka Univ.) ED2012-37 CPM2012-21 SDM2012-39 |
The LiMn2O4 films for Li secondary batteries have been prepared by a RF magnetron sputtering method. In this research, w... [more] |
ED2012-37 CPM2012-21 SDM2012-39 pp.99-104 |
ED, SDM, CPM |
2012-05-18 15:15 |
Aichi |
VBL, Toyohashi Univ. of Technol. |
Co-catalyitic effect on improving the photocatalytic properties of TiO2 films Masaaki Isai, Ikuta Nakamura, Yuuki Hieda, Fumiya Fukazawa (Shizuoka Univ.), Yoichi Hoshi (Tokyo Polytech.Univ.) ED2012-38 CPM2012-22 SDM2012-40 |
Abstract TiO2 films were prepared with RF magnetron sputtering method. The copper (cu) and iron (Fe) films were deposit... [more] |
ED2012-38 CPM2012-22 SDM2012-40 pp.105-109 |
SDM, OME |
2012-04-28 11:30 |
Okinawa |
Okinawa-Ken-Seinen-Kaikan Bldg. |
Electrical Characterization of SiO2 and SiN Films Deposited by RF Sputtering Keisuke Yagi, Tatsuya Okada, Takashi Noguchi (Univ.Ryukyus) SDM2012-17 OME2012-17 |
SiO2 and SiN films of 100 nm thickness were deposited on the Si substrate by RF sputtering. After thermal annealing, at ... [more] |
SDM2012-17 OME2012-17 pp.75-77 |
OPE |
2011-12-16 13:55 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
Light-emitting properties of rare-earth-doped Ta2O5 thin films fabricated by using rf sputtering Kenta Miura, Yuki Arai, Osamu Hanaizumi (Gunma Univ.) OPE2011-143 |
Eu-doped Ta2O5 films were prepared by using rf magnetron sputtering. Visible photoluminescence was obtained from the fil... [more] |
OPE2011-143 pp.13-16 |
MRIS, ITE-MMS |
2011-12-16 10:00 |
Ehime |
Ehime Univ. |
Crystalline orientation control of collimated sputtering film Akito Honda, Naoki Honda (Touhoku Inst. of Tech.) MR2011-33 |
Preparation of inclined orientation films was studied using oblique incidence collimated sputtering. Large deflection in... [more] |
MR2011-33 pp.57-62 |
CPM |
2011-10-26 13:00 |
Fukui |
Fukui Univ. |
Structual characterization of CuAlO2 films deposited by reactive sputtering using composite target Takuya Yokomoto, Yosuke Maeda, Takumi Miyazawa, Tomohiko Yamakami, Katsuya Abe (SinshuUniv.) CPM2011-109 |
CuAlO2 films were prepared by reactive magnetron sputtering using Al-Cu hybrid targets
and these structural properties ... [more] |
CPM2011-109 pp.1-4 |
SDM |
2011-07-04 16:20 |
Aichi |
VBL, Nagoya Univ. |
Resistive Switching Properties of Si-Oxide Thin Films Prepared by RF Sputtering Akio Ohta, Yuta Goto, Shingo Nishigaki, Guobin Wei, Hideki Murakami, Seiichiro Higashi (Hiroshima Univ.), Seiichi Miyazaki (Nagoya Univ.) SDM2011-67 |
Resistance-switching properties of RF sputtered Si-rich oxides sandwiching with Pt electrodes have been studided in comp... [more] |
SDM2011-67 pp.97-102 |
CPM, SDM, ED |
2011-05-20 13:25 |
Aichi |
Nagoya Univ. (VBL) |
Preparation and evaluation of Ga2O3 ovygen sensors Takahiro Yamamoto, Shinya Kayano, Hiroki Ikeda, Yoshifumi Suzuki, Masaaki Isai (Shizuoka Univ.) ED2011-27 CPM2011-34 SDM2011-40 |
Recently, from a point of environmental problems, oxygen gas sensors attract attention of controlling the exhaust gas. T... [more] |
ED2011-27 CPM2011-34 SDM2011-40 pp.135-138 |
CPM, SDM, ED |
2011-05-20 13:50 |
Aichi |
Nagoya Univ. (VBL) |
Stabilized Pt deposition on the TiO2 films and their photocatalytic properties Ikuta Nakamura, Takanori Sato, Masaaki Isai (Shizuoka Univ.), Yoichi Hoshi (Tokyo polytech.Univ.) ED2011-28 CPM2011-35 SDM2011-41 |
TiO2 films were prepared with RF magnetron sputtering method. The platinum (Pt) films were deposited on the TiO2 films. ... [more] |
ED2011-28 CPM2011-35 SDM2011-41 pp.139-143 |
CPM, SDM, ED |
2011-05-20 14:15 |
Aichi |
Nagoya Univ. (VBL) |
Preparation and evaluation of LiMn2O4 films prepared by sputtering method Mitsuhiro Nakamura, Akio Niwa, Masaaki Isai (Shizuoka Univ.) ED2011-29 CPM2011-36 SDM2011-42 |
The LiMn2O4 films for Li secondary batteries have been prepared by a RF magnetron sputtering method. In this research, w... [more] |
ED2011-29 CPM2011-36 SDM2011-42 pp.145-149 |
OME |
2011-02-07 13:50 |
Tokyo |
Kikai-Shinko-Kaikan Bldg. |
Application of Quartz Crystal Microbalance with Organic Thin Films prepared by Spin coat and RF Sputtering for Active Oxygen Monitoring Hiroyuki Matsumoto, Kiyoshi Yoshino, Tatsuyuki Iwasaki, Shinobu Kinoshita (Iwasaki Electric), Kazutoshi Noda (AIST), Wataru Arai, Satoru Iwamori (Tokai Univ.) OME2010-70 |
To investigate potential as an active oxygen monitor, fluorocarbon polymers prepared by a spin coating and RF sputtering... [more] |
OME2010-70 pp.11-14 |
ITE-MMS, MRIS, ITE-CE [detail] |
2011-01-20 13:30 |
Osaka |
Shoshin-Kaikan Bldg. |
High perpendicular exchange bias with a unique temperature dependence in Pt/Co/α-Cr2O3(0001) thin films Hiroto Oikawa, Hayato Noutomi, Toshiaki Fujita, Yu Shiratsuchi, Ryoichi Nakatani (Osaka Univ.) MR2010-53 |
We investigated perpendicular exchange bias of Pt/Co/α-Cr2O3(0001) thin films which were fabricated by means of DC magne... [more] |
MR2010-53 pp.7-11 |
ITE-MMS, MRIS |
2010-12-10 10:45 |
Ehime |
Ehime Univ. |
Fundamental study of crystalline orientation control by collimated sputtering Naoki Honda, Akito Honda (Tohoku Inst. Tech.) MR2010-51 |
Fundamental investigation was performed for crystalline orientation control by collimated sputtering with the purpose of... [more] |
MR2010-51 pp.65-72 |
SDM, CPM, ED |
2010-05-14 10:25 |
Shizuoka |
Shizuoka University (Hamamatsu Campus) |
Investigation of deposition condition of LiMn2O4 films prepared by RF magnetron sputtering Mitsuhiro Nakamura, Masaaki Isai (Shizuoka Univ.) ED2010-26 CPM2010-16 SDM2010-26 |
The LiMn2O4 films for Li secondary batteries have been prepared by a RF magnetron sputtering method. This research was d... [more] |
ED2010-26 CPM2010-16 SDM2010-26 pp.51-55 |
SDM, CPM, ED |
2010-05-14 10:50 |
Shizuoka |
Shizuoka University (Hamamatsu Campus) |
Preparation and evaluation of Ga2O3 oxygen sensors Shinya Kayano, Naoya Yamaguchi, Masaaki Isai (Shizuoka Univ.) ED2010-27 CPM2010-17 SDM2010-27 |
Recentry, from a point of environmental problems, oxygen gas sensors attract attention of controlling the exhaust gas. ... [more] |
ED2010-27 CPM2010-17 SDM2010-27 pp.57-60 |
SDM, CPM, ED |
2010-05-14 11:30 |
Shizuoka |
Shizuoka University (Hamamatsu Campus) |
Preparation of Pt-deposited TiO2 films and evaluation of photocatalystic properties Ikuta Nakamura, Tatsuya Ito, Masaaki Isai (Shizuoka Univ.), Yoichi Hoshi (Tokyo Polytechnic Univ.) ED2010-28 CPM2010-18 SDM2010-28 |
This research was designed for planning a progress of photocatalystic properties of TiO2 thin films with depositing Pt p... [more] |
ED2010-28 CPM2010-18 SDM2010-28 pp.61-64 |