電子情報通信学会技術研究報告

Print edition: ISSN 0913-5685      Online edition: ISSN 2432-6380

Volume 110, Number 110

シリコン材料・デバイス

開催日 2010-06-30 - 2010-07-02 / 発行日 2010-06-23

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目次

SDM2010-49
[基調講演]Challenge for electromechanical logic systems using compound semiconductor heterostructures
○Hiroshi Yamaguchi・Imran Mahboob・Hajime Okamoto・Koji Onomitsu(NTT)
pp. 1 - 4

SDM2010-50
[招待講演]Nano-Electromechanical (NEM) Nonvolatile Memory for Low-Power Electronics
○Woo Young Choi(Sogang Univ.)
pp. 5 - 6

SDM2010-51
[招待講演]Dual-gate ZnO thin-film transistors with SiNx as Dielectric Layer
Young Su Kim・Min Ho Kang(National Nanofab Center)・Kang Suk Jeong(Chungnam National Univ.)・Jae Sub Oh・Dong Eun Yoo(National Nanofab Center)・Hi Deok Lee・○Ga-Won Lee(Chungnam National Univ.)
pp. 7 - 8

SDM2010-52
[招待講演]Piezoelectric material based passive RFID tags
○Hyunchul Bae・Jaekwon Kim・Jinwook Burm(Sogang Univ.)
pp. 9 - 10

SDM2010-53
[招待講演]Low-temperature Epitaxial Growth of Ferromagnetic Silicide for SiGe Based Spintransistors
○Masanobu Miyao(Kyushu Univ.)・Kohei Hamaya(Kyushu Univ./JST)
pp. 11 - 13

SDM2010-54
[招待講演]Toward high-efficiency thin-film solar cells using semiconducting BaSi2
○Takashi Suemasu・Mitsutaka Saito・Atsushi Okada・Katsuaki Tou・Ajimal Khan(Univ. of Tsukuba.)・Noritaka Usami(Tohoku Univ.)
pp. 15 - 19

SDM2010-55
[招待講演]Applications of Smart Cut(TM) Technologies to III-V Based Engineered Substrates
○Makoto Yoshimi(Soitec)
pp. 21 - 22

SDM2010-56
A New Cone-Type 1T DRAM Cell
○Gil Sung Lee・Doo-Hyun Kim・Jang-Gn Yun・Jung Hoon Lee・Yoon Kim・Jong-Ho Lee・Hyungcheol Shin・Byung-Gook Park(Seoul National Univ.)
pp. 23 - 25

SDM2010-57
Dependence of Ag film thickness on Formation of Ag Nano-crystals to Fabricate Polymer Nonvolatile Memory
○Jong-Dae Lee・Hyun-Min Seung・Kyoung-Cheol Kwon・Jea-Gun Park(Hanyang Univ.)
pp. 27 - 30

SDM2010-58
The Impact of H2 Anneal on Resistive Switching in Pt/TiO2/Pt Structure
○Guobin Wei・Yuta Goto・Akio Ohta・Katsunori Makihara・Hideki Murakami・Seiichiro Higashi・Seiichi Miyazaki(Hiroshima Univ.)
pp. 31 - 36

SDM2010-59
Threshold Voltage Roll-off Mechanisms in SONOS Flash Memory in Retention Mode Including Trapped Charge Redistribution Effect
○Doo-Hyun Kim・Gil Sung Lee・Seongjae Cho・Jung Hoon Lee・Jang-Gn Yun・Dong Hua Li・Yoon Kim・Se Hwan Park・Won Bo Shim・Wandong Kim・Byung-Gook Park(Seoul National Univ.)
pp. 37 - 40

SDM2010-60
Vertical Organic Field Effect Transistors with an Additional Gate Insulation Structure between Active Layer and Gate Electrode
○Donghyun Kim・Jaewook Jeong・Yongtaek Hong(Seoul National Univ.)
pp. 41 - 42

SDM2010-61
Investigation of n-type pentacene based MOS diodes with ultra-thin metal interface layer
○Young uk Song・Shun-ichiro Ohmi(Tokyo Inst. of Tech.)
pp. 43 - 46

SDM2010-62
Fundamental oscillations at ~900 GHz with low bias voltages in RTDs having spike-doped structures
○Safumi Suzuki・Kiyohito Sawada・Atsushi Teranishi・Masahiro Asada(Tokyo Inst. of Tech.)・Hiroki Sugiyama・Haruki Yokoyama(NTT)
pp. 47 - 48

SDM2010-63
Analysis of low loss and wideband characteristics for monolithic isolators using resonant tunneling diodes
○Nobuhiko Tanaka・Mitsufumi Saito・Michihiko Suhara(Tokyo Metro. Univ.)
pp. 49 - 53

SDM2010-64
Investigation of Abnormal Drain Current Increase of Tunneling Field-Effect Transistors
○Min Jin Lee・Woo Younhg Choi(Sogang Univ.)
pp. 55 - 56

SDM2010-65
A design of Novel IGBT with Oblique Trench Gate
Juhyun Oh・Dae Hwan Chun(Koria Univ.)・Eui Bok Lee(Koria Univ./KIST)・○Young Hwan Kim・Chun Keun Kim(KIST)・Byeong Kwon Ju・Man Young Sung(Koria Univ.)・Yong Tae Kim(KIST)
pp. 57 - 59

SDM2010-66
Electrical Characteristics of Atomic Layer Deposited Tungsten Nitride Diffusion Barrier for Cu Interconnects
○Yong Tae Kim(KIST)・Eui Bok Lee(Koria Univ./KIST)・Young Hwan Kim・Chun Keun Kim(KIST)・Byeong Kwon Ju(Koria Univ.)
pp. 61 - 63

SDM2010-67
[招待講演]Synthesis of wafer scale graphene layer for future electronic devices
○Byung Jin Cho・Jeong Hun Mun(KAIST)
pp. 65 - 67

SDM2010-68
[招待講演]Graphene channel FET: A New Candidate for High-Speed Devices
○Tetsuya Suemitsu(Tohoku Univ.)
pp. 69 - 72

SDM2010-69
Deoxyribonucleic Acid Sensitive Graphene Field-Effect Transistors
○J. S. Hwang・H. T. Kim(Korea Univ.)・J. H. Lee・D. M. Whang(Korea Univ./Sungkyunkwan Univ.)・S. W. Hwang(Korea Univ.)
pp. 73 - 74

SDM2010-70
Fabrication of InP/InGaAs DHBTs with buried SiO2 wires
○Naoaki Takebe・Takashi Kobayashi・Hiroyuki Suzuki・Yasuyuki Miyamoto・Kazuhito Furuya(Tokyo Inst. of Tech.)
pp. 75 - 79

SDM2010-71
Reliability study on the emitter-base junction for high-speed sub-micron InP HBTs
○Yoshino K. Fukai・Kenji Kurishima・Norihide Kashio・Shoji Yamahata(NTT Photonics Labs.)
pp. 81 - 84

SDM2010-72
Electrochemical formation of InP porous structures for their application to photoelectric conversion devices
○Hiroyuki Okazaki・Taketomo Sato・Naoki Yoshizawa・Tamotsu Hashizume(Hokkaido Univ)
pp. 85 - 89

SDM2010-73
50-Gbit/s MUX/DEMUX IC modules using feed-trough type metal-wall package technique
○Satoshi Tsunashima・Michihiro Hirata・Koichi Murata(NTT Corp.)
pp. 91 - 96

SDM2010-74
94-GHz Monolithic Down-Converter for FMCW Radar Sensor using Metamorphic HEMTs
○Yong-Hyun Baek・Sang-Jin Lee・Tae-Jong Baek・Seok-Gyu Choi・Min Han・Dong-Sik Ko・Jin-Koo Rhee(Dongguk Univ.)
pp. 97 - 100

SDM2010-75
A Sub-Harmonic RF Transmitter Architecture with Simultaneous Power Combination and LO Leakage Cancellation
○Bongsub Song(Sogang Univ.)・Dohyung Kim(Samsung Electronics)・Jinwook Burm(Sogang Univ.)
pp. 101 - 104

SDM2010-76
RF Interconnect Technology for On-Chip and Off-Chip Communication
○Jongsun Kim(Hongik Univ.)・B. Byun・M.Frank Chang(Univ. of California)
pp. 105 - 108

SDM2010-77
[基調講演]Future perspective for the mainstream CMOS technology and their contribution to green technologies
○Hiroshi Iwai(Tokyo Inst. of Tech.)
pp. 109 - 114

SDM2010-78
[招待講演]High Transport Si/SiGe Heterostructures for CMOS Transistors with Orientation and Strain Enhanced Mobility
○Jungwoo Oh・J. Huang・I. Ok・S. H. Lee・P. D. Kirsch・R. Jammy・Hi-Deok Lee(SEMATECH)
pp. 115 - 118

SDM2010-79
[招待講演]III-V/Ge CMOS technologies and heterogeneous integrations on Si platform
○Shinichi Takagi・Mitsuru Takenaka(Univ. of Tokyo.)
pp. 119 - 124

SDM2010-80
[招待講演]Stress and Surface Orientation Engineering in Scaled CMOSFETs Considering High-Field Carrier Transport
○Masumi Saitoh・Yukio Nakabayashi(Toshiba)・Ken Uchida(Tokyo Inst. of Tech.)・Toshinori Numata(Toshiba)
pp. 125 - 129

SDM2010-81
[招待講演]Si single-dopant devices and their characterization
○Michiharu Tabe・Daniel Moraru・Earfan Hamid・Miftahul Anwar・Arief Udhiarto・Ryusuke Nakamura・Sakito Miki・Takeshi Mizuno(Shizuoka Univ.)
pp. 131 - 136

SDM2010-82
[招待講演]Investigation on fabrication of nanoscale patterns using laser interference lithography
○Jinnil Choi・Jung Ho・Ki-Young Dong・Eun-Mi Park・Byeong-Kwon Ju(Korea Univ.)
pp. 137 - 140

SDM2010-83
[招待講演]Bottom-up synthesis of metal-free elementary semiconductor nanowires
○Dongmok Whang(Sungkyunkwan Univ.)・Sung Woo Hwang(Koria Univ.)
pp. 141 - 142

SDM2010-84
Fabrication of Oxide Thin Film Transistor based on SOG dielectric and solution ZnO
○Jung Ho Park・Jinnil Choi・Seongpil Chang・Ki-Young Dong・Eun-Mi Park・Byeong-Kwon Ju(Univ. of Korea)
pp. 143 - 146

SDM2010-85
Device Simulation of Amorphous Indium-Gallium-Zinc-Oxide Thin Film transistors with various interfacial Dielectric layers
○Hyo-seong Seong・Ji-hoon Son・Woo-sung Kim・Hong-seung Kim(Korea Maritime Univ.)・Woo-seok Cheong(ETRI)・Nak-won Jang(Korea Maritime Univ.)
pp. 147 - 148

SDM2010-86
Acivation behaviour for doped Si films after laser or furnace annealing
Takashi Noguchi・○Toshiharu Suzuki(Univ. of Ryukyus)
pp. 149 - 153

SDM2010-87
Strain effects in resistor stress sensor fabricated on (001) silicon and their influences on the determination of piezoresistive coefficients
○Chun-Hyung Cho・Ho-Young Cha(Hongik Univ.)
pp. 155 - 160

SDM2010-88
Fabrication of gas sensor using pd doped SnO2 nanotubes
○Ki-Young Dong・In-Sung Hwang・Dae-Jin Ham・Jinnil Choi・Jung-Ho Park・Jong-Heun Lee・Byeong-Kwon Ju(Korea Univ.)
pp. 161 - 162

SDM2010-89
Analysis of Transfer Gate in CMOS Image Sensor
○Seonghyung Park・Hyuk-Min Kwon・Jung-Deuk Bok・In-Shik Han・Woonil Choi・Hi-Deok Lee(Chungnam National Univ)
pp. 163 - 164

SDM2010-90
Interaction of bis-diethylaminosilane with hydroxylized Si (001) surface for SiO2 thin-film growth using density functional theory
○Seung-Bin Baek・Dae-Hee Kim(Korea Univ. of Tech. and Edu.)・Yong-Chan Jeong(ASM Genitech)・Yeong-Cheol Kim(Korea Univ. of Tech. and Edu.)
pp. 165 - 168

SDM2010-91
Electrical and structural properties of metal oxide semiconductor (MOS) devices with Pt/Ta2O5 gate stacks
○Hoon-Ki Lee・Jagadeesh Chandra・Kyu-Hwan Shim(Chonbuk National Univ.)・Hyung-Joong Yun・Jouhahn Lee(KBSI)・Chel-Jong Choi(Chonbuk National Univ.)
pp. 169 - 172

SDM2010-92
Modulation of PtSi work function by alloying with low work function metal
○Jun Gao・Jumpei Ishikawa・Shun-ichiro Ohmi(Tokyo Inst. of Tech.)
pp. 173 - 176

SDM2010-93
The Analysis of Temperature Dependency of the Mobility In High-k/Metal Gate MOSFET and the Performance on its CMOS Inverter
○Takeshi Sasaki・Takuya Imamoto・Tetsuo Endoh(Tohoku Univ.)
pp. 177 - 182

SDM2010-94
High Integrity Gate Insulator Films on Atomically Flat Silicon Surface
○Xiang Li・Rihito Kuroda・Tomoyuki Suwa・Akinobu Teramoto・Shigetoshi Sugawa・Tadahiro Ohmi(Tohoku Univ.)
pp. 183 - 188

SDM2010-95
Characterization of Mg Diffusion into HfO2/SiO2/Si(100) Stacked Structures and Its Impact on Detect State Densities
○Akio Ohta・Daisuke Kanme・Hideki Murakami・Seiichiro Higashi・Seiichi Miyazaki(Hiroshima Univ.)
pp. 189 - 194

SDM2010-96
Evaluation of 1/f Noise Characteristics in High-k/Metal Gate and SiON/Poly-Si Gate MOSFET
○Takuya Imamoto・Takeshi Sasaki・Tetsuo Endoh(Tohoku Univ.)
pp. 195 - 198

SDM2010-97
[招待講演]High-k materials and poly-Si nanowires in nonvolatile memory for 3D flash memory and display panel applications
○Yung-Chun Wu・Min-Feng Hung・Jiang-Hung Chen・Lun-Chun Chen・Ji-Hong Jiang(National Tsing Hua Univ. Taiwan)
pp. 199 - 204

SDM2010-98
[招待講演]A Single Element Phase Transition Memory
Sang-Hyeon Lee・○Moonkyung Kim(Cornell Univ.)・Byung-ki Cheong(KIST)・Jooyeon Kim(Ulsan College)・Jo-Won Lee(National Program for Tera-level Nano Devices, Korea)・Sandip Tiwari(Cornell Univ.)
pp. 205 - 209

SDM2010-99
Impact of Floating Body type DRAM with the Vertical MOSFET
○Yuto Norifusa・Tetsuo Endoh(Tohoku Univ./JST)
pp. 211 - 216

SDM2010-100
Independent Gate Twin-bit SONOS Flash Memory with Split-gate Effect
○Yoon Kim・Jang-Gn Yun・Jung Hoon Lee・Gil Sung Lee・Se Hwan Park・Jong-Ho Lee・Hyungcheol Shin・Byung-Gook Park(Seoul National Univ.)
pp. 217 - 220

SDM2010-101
Theoretical Study of the Hydrogen Effect on the Program/Erase Cycle of MONOS-Type Memories
Akira Otake・○Keita Yamaguchi・Kenji Shiraishi(Univ. of Tsukuba.)
pp. 221 - 224

SDM2010-102
The optimum physical targets of the 3-dimensional vertical FG NAND flash memory cell arrays with the extended sidewall control gate (ESCG) structure
○Moon-Sik Seo(Tohoku Univ.)・Tetsuo Endoh(Tohoku Univ./JST)
pp. 225 - 230

SDM2010-103
New Method for Evaluating the Scaling Trend of Nano-Electro-Mechanical (NEM) Nonvolatile Memory Cells
○Seung Hyeun Roh・Woo Young Choi(Sogang Univ.)
pp. 231 - 232

SDM2010-104
[招待講演]Development of Low on-resistance SiC Trench MOSFET and other SiC power devices
○Yuki Nakano・Ryota Nakamura・Katsuhisa Nagao・Takashi Nakamura・Hidemi Takasu(ROHM)
pp. 233 - 236

SDM2010-105
Effects of Field Plate and Buried Gate Structures on Silicon Carbide Metal-Semiconductor Field-Effect Transistors
○Jaegil Lee・Chun-Hyung Cho・Ho-Young Cha(Hongik Univ.)
pp. 237 - 240

SDM2010-106
[招待講演]InAlN/GaN HEMT Structures on 4-in Silicon Grown by MOCVD
○Makoto Miyoshi・Shigeaki Sumiya・Mikiya Ichimura・Tomohiko Sugiyama・Sota Maehara・Mitsuhiro Tanaka(NGK)・Takashi Egawa(Nagoya Inst. of Tech.)
pp. 241 - 244

SDM2010-107
A comparative study on AlGaN/GaN based HEMT and MIS-HEMT with Al2O3 as gate dielectric
○Joseph Freedsman・Arata Watanabe・Lawrence Selvaraj・Takashi Egawa(Nagoya Inst. of Tech.)
pp. 245 - 248

SDM2010-108
Characterization of deep electron levels of AlGaN grown by MOVPE
○Kimihito Ooyama(Hokkaido Univ./SMM)・Katsuya Sugawara(Hokkaido Univ.)・Hiroyuki Taketomi・Hideto Miyake・Kazumasa Hiramatsu(Mie Univ.)・Tamotsu Hashizume(Hokkaido Univ./JST)
pp. 249 - 252

SDM2010-109
Characteristics of GaN p-n diode with damage layer induced by ICP plasma process
○Tsutomu Uesugi・Tetsu Kachi(Toyota Central R&D Labs.)・Tamotsu Hashizume(Hokkaido Univ.)
pp. 253 - 256

SDM2010-110
The Impact of Current Controlled-MOS Current Mode Logic /Magnetic Tunnel Junction Hybrid Circuit for Stable and High-speed Operation
○Tetsuo Endoh・Masashi Kamiyanagi・Masakazu Muraguchi・Takuya Imamoto・Takeshi Sasaki(Tohoku Univ.)
pp. 257 - 262

SDM2010-111
Verification of Stable Circuit Operation of 180nm Current Controlled MOS Current Mode Logic under Threshold Voltage Fluctuation
○Masashi Kamiyanagi・Takuya Imamoto・Takeshi Sasaki・Hyoungjun Na・Tetsuo Endoh(Tohoku Univ.)
pp. 263 - 267

SDM2010-112
A Non-snapback NMOS ESD Clamp Circuit using Gate-Coupled Scheme with Isolated Well in a Bipolar-CMOS-DMOS Process
○Jae-Young Park・Dae-Woo Kim・Young-San Son・Jong-Chan Ha・Jong-Kyu Song・Chang-Soo Jang・Won-Young Jung(Dongbu HiTek)
pp. 269 - 274

SDM2010-113
A Precision Floating-Gate Mismatch Measurement Technique for Analog Applications
○Won-Young Jung・Jong Min Kim・Jin-Soo Kim・Taek-Soo Kim(Dongbu HiTek)
pp. 275 - 278

SDM2010-114
A Physical-Based Modeling for Accurate Wide-Width LDMOS
○Won-Young Jung・Jong-Sub Lee・Eun-Jin Kim・Ki-Jung Park・San-Hun Kwak・Jin-Soo Kim・Taek-Soo Kim(Dongbu HiTek)
pp. 279 - 282

SDM2010-115
Over 1GHz High-Speed Current Pulse Generation Circuit for Novel Nonvolatile Memory Cells
○Tetsuo Endoh・Yasuhiko Suzuki・Takuya Imamoto・Hyoungjun Na(Tohoku Univ.)
pp. 283 - 288

SDM2010-116
A V-band Common-Source Low Noise Amplifier in 0.13 μm RFCMOS Technology
○Sung-Jin Kim・Dong-Hyun Kim・Jae-Sung Rieh(Korea Univ.)
pp. 289 - 292

SDM2010-117
A 0.18 um CMOS process 10-PAM transceiver for 10 Gigabit Ethernet
○Nayeon Cho・J K Jeong・J J Lee・J Burm(Sogang Univ.)
pp. 293 - 296

SDM2010-118
A Switched-Capacitor Integrator Using Dynamic Source-Follower Amplifiers
○Ryoto Yaguchi・Fumiyuki Adachi・Takao Waho(Sophia Univ.)
pp. 297 - 300

SDM2010-119
A Basic Study on RF Characteristics of Short Wavelength Comb-type Transmission Line on MMIC
○Jang-Hyeon Jeong・Young-Bae Park・Bo-Ra Jung・Jeong-Gab Ju・Eui-Hoon Jang・Chi-Hong Min・Seong-Il Hong・Suk-Youb Kang・Hong Seung Kim・Young Yun(Korea Maritime Univ.)
pp. 301 - 302

SDM2010-120
High Current Drivability FD-SOI CMOS with Low Source/Drain Series Resistance
○Yukihisa Nakao・Rihito Kuroda・Hiroaki Tanaka・Akinobu Teramoto・Shigetoshi Sugawa・Tadahiro Ohmi(Tohoku Univ.)
pp. 303 - 308

SDM2010-121
Study on Impurity Distribution Dependence of Electron-Dynamics in Vertical MOSFET
○Masakazu Muraguchi・Tetsuo Endoh(Tohoku Univ./JST)
pp. 309 - 313

SDM2010-122
Characteristic of Dual-Gate Single Electron Transistor (DG-SET) with extended channel using shallow doping and sidewall patterning for suppressing MOS current
○Joung-eob Lee・Kwon-Chil Kang・Jung Han Lee・Kim Kyung Wan・Byung-Gook Park(Seoul National Univ.)
pp. 315 - 318

SDM2010-123
Study on Collective Electron Motion in Si-Nano Dot Floating Gate MOS Capacitor
○Masakazu Muraguchi(Tohoku Univ.)・Yoko Sakurai・Yukihiro Takada・Shintaro Nomura・Kenji Shiraishi(Univ. of Tsukuba.)・Mitsuhisa Ikeda・Katsunori Makihara・Seiichi Miyazaki(Hiroshima Univ.)・Yasuteru Shigeta(Univ. of Hyogo)・Tetsuo Endoh(Tohoku Univ.)
pp. 319 - 324

注: 本技術報告は査読を経ていない技術報告であり,推敲を加えられていずれかの場に発表されることがあります.


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